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Polymer masks for structured surface and plasma etching
Polymer masks for structured surface and plasma etching
Polymer masks for structured surface and plasma etching
Vital, A. (Autor:in) / Vayer, M. (Autor:in) / Sinturel, C. (Autor:in) / Tillocher, T. (Autor:in) / Lefaucheux, P. (Autor:in) / Dussart, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 332 ; 237-246
01.01.2015
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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