Plasma etching of thermoset polymer films for microchannels

Holland, A. / Cher, C. / Rosengarten, G. et al. | British Library Online Contents | 2006

Polymer masks for structured surface and plasma etching

Vital, A. / Vayer, M. / Sinturel, C. et al. | British Library Online Contents | 2015

Etching of platinum thin films in an inductively coupled plasma

Wuu, D. S. / Kuo, N. H. / Liao, F. C. et al. | British Library Online Contents | 2001

Modelling plasma etching of Al thin films using neural network

Kim, B. / Park, K. Y. / Han, D. | British Library Online Contents | 2004

Synthesis of 3-oxatricyclo[4.4.0.02,7]decene derivatives

Zolotarev, R. N. / Yakovlev, M. E. / Razin, V. V. | British Library Online Contents | 2006