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Polymer masks for structured surface and plasma etching

Vital, A. / Vayer, M. / Sinturel, C. / Tillocher, T. / Lefaucheux, P. / Dussart, R.

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Polymer masks for structured surface and plasma etching

Vital, A. / Vayer, M. / Sinturel, C. / Tillocher, T. / Lefaucheux, P. / Dussart, R.

Polymer masks for structured surface and plasma etching

Vital, A. / Vayer, M. / Sinturel, C. / Tillocher, T. / Lefaucheux, P. / Dussart, R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Polymer masks for structured surface and plasma etching

Contributors:

Vital, A. (author) / Vayer, M. (author) / Sinturel, C. (author) / Tillocher, T. (author) / Lefaucheux, P. (author) / Dussart, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 332 ; 237-246

Publication date:

2015-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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