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Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge
Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge
Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge
Cameron, D. C. (Autor:in) / Krumpolec, R. (Autor:in) / Ivanova, T. V. (Autor:in) / Homola, T. (Autor:in) / Cernak, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 345 ; 216-222
01.01.2015
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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