An iron(II) diketonate-diamine complex as precursor for thin film fabrication by atomic layer deposition

Bratvold, J. E. / Carraro, G. / Barreca, D. et al. | British Library Online Contents | 2015

NbCl~3 as a precursor in atomic layer epitaxy

Elers, K.-E. / Ritala, M. / Leskelae, M. et al. | British Library Online Contents | 1994

Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Bosund, M. / Mizohata, K. / Hakkarainen, T. et al. | British Library Online Contents | 2009

Atomic layer epitaxy of germanium

Sugahara, S. / Kitamura, T. / Imai, S. et al. | British Library Online Contents | 1994

Organometallic Vapor Phase Epitaxy (OMVPE)

Breiland, W. G. / Coltrin, M. E. / Creighton, J. R. et al. | British Library Online Contents | 1999