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Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
JOURNAL OF MATERIALS SCIENCE ; 51 ; 5811-5822
01.01.2016
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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