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Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
JOURNAL OF MATERIALS SCIENCE ; 51 ; 5811-5822
2016-01-01
12 pages
Article (Journal)
English
DDC:
620.11
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