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Surface engineering of SiC via sublimation etching
Surface engineering of SiC via sublimation etching
Surface engineering of SiC via sublimation etching
Jokubavicius, V. (Autor:in) / Yazdi, G. R. (Autor:in) / Ivanov, I. G. (Autor:in) / Niu, Y. (Autor:in) / Zakharov, A. (Autor:in) / Iakimov, T. (Autor:in) / Syväjärvi, M. (Autor:in) / Yakimova, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 390 ; 816-822
01.01.2016
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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