Optimal process parameters for phosphorus spin-on-doping of germanium

Boldrini, Virginia / Carturan, Sara Maria / Maggioni, Gianluigi et al. | British Library Online Contents | 2017

Doping of germanium by phosphorus implantation: Prediction of diffused profiles with simulation

Koffel, S. / Scheiblin, P. / Claverie, A. et al. | British Library Online Contents | 2008

Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. et al. | British Library Online Contents | 2008

Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. et al. | British Library Online Contents | 2008

Phosphorus and boron doping effects on solid phase recrystallization of polycrystalline silicon films amorphized by germanium ion implantation

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