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Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressure
Jeong, Kyunghoon (author) / Lee, Jiwon (author) / Byun, Injae (author) / Seong, Myung-jun (author) / Park, Jongsoo (author) / Kim, Hyoun Woo (author) / Kim, Moon J. (author) / Kim, Jae-Hun (author) / Lee, Jaegab (author)
Materials science in semiconductor processing ; 68 ; 245-251
2017-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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