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Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Salvati, E. / Brandt, L.R. / Papadaki, C. / Zhang, H. / Mousavi, S.M. / Wermeille, D. / Korsunsky, A.M.

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Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Salvati, E. / Brandt, L.R. / Papadaki, C. / Zhang, H. / Mousavi, S.M. / Wermeille, D. / Korsunsky, A.M.

Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Salvati, E. / Brandt, L.R. / Papadaki, C. / Zhang, H. / Mousavi, S.M. / Wermeille, D. / Korsunsky, A.M.

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Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

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Dokumentinformationen

Titel:

Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Beteiligte:

Salvati, E. (Autor:in) / Brandt, L.R. (Autor:in) / Papadaki, C. (Autor:in) / Zhang, H. (Autor:in) / Mousavi, S.M. (Autor:in) / Wermeille, D. (Autor:in) / Korsunsky, A.M. (Autor:in)

Erschienen in:

MATERIALS LETTERS ; 213 ; 346-349

Erscheinungsdatum:

01.01.2018

Format / Umfang:

4 pages

ISSN:

0167-577X

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Unbekannt

Salvati, E. / Brandt, L.R. / Papadaki, C. et al. | British Library Online Contents | 2018

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Salvati, E. / Romano-Brandt, L. / Mughal, M.Z. et al. | British Library Online Contents | 2019

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Zamani, H. / Lee, S.W. / Avishai, A. et al. | British Library Online Contents | 2012

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Chaiwan, S. / Hoffman, M. / Munroe, P. et al. | British Library Online Contents | 2002

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