Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

Xu, Yongchao / Lu, Jing / Xu, Xipeng | British Library Online Contents | 2016

Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

Xu, Yongchao / Lu, Jing / Xu, Xipeng | British Library Online Contents | 2016

Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

Xu, Y. / Lu, J. / Xu, X. | British Library Online Contents | 2016

Inlaid Copper Multilevel Interconnections Using Planarization by Chemical-Mechanical Polishing

Murarka, S. P. / Steigerwald, J. / Gutmann, R. J. | British Library Online Contents | 1993

Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

Niu, X.H. / Huang, Y.H. / Zhou, J.W. et al. | British Library Online Contents | 2014