Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

López, J. / Sotelo, A. / Castillón, F.F. et al. | British Library Online Contents | 2017

Microstructure and interfacial properties of HfO2-Al2O3 nanolaminate films

Liu, M. / He, G. / Zhu, L. Q. et al. | British Library Online Contents | 2006

Microstructural evolution of ZrO~2-HfO~2 nanolaminate structures grown by atomic layer deposition

Kim, H. / McIntyre, P. C. / Saraswat, K. C. | British Library Online Contents | 2004

TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Mitchell, D. R. / Attard, D. J. / Finnie, K. S. et al. | British Library Online Contents | 2005

Electrical conduction mechanisms and dielectric relaxation in Al2O3 thin films deposited by thermal atomic layer deposition

Altuntas, Halit / Kaplan, Kemal | British Library Online Contents | 2018