Investigation of defects in ultra-thin Al2O3 films deposited on pure copper by the atomic layer deposition technique

Chang, M.L. / Wang, L.C. / Lin, H.C. et al. | British Library Online Contents | 2015

Investigation of defects in ultra-thin Al2O3 films deposited on pure copper by the atomic layer deposition technique

Chang, M. L. / Wang, L. C. / Lin, H. C. et al. | British Library Online Contents | 2015

Investigation of defects in ultra-thin Al2O3 films deposited on pure copper by the atomic layer deposition technique

Chang, M.L. / Wang, L.C. / Lin, H.C. et al. | British Library Online Contents | 2015

Hydrogen induced interface passivation in atomic layer deposited Al2O3 films and Al2O3/SiO2 stacks

Li, Shizheng / Yang, Ning / Yuan, Xiao et al. | British Library Online Contents | 2018

Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition

Zhang, J. / Yang, H. / Zhang, Q. l. et al. | British Library Online Contents | 2013