Etching process of silicon carbide from polysiloxane by chlorine

Duan, L. / Ma, Q. / Chen, Z. | British Library Online Contents | 2014

Etching process of silicon oxycarbide from polysiloxane by chlorine

British Library Online Contents | 2015

4H Silicon Carbide Etching Using Chlorine Trifluoride Gas

Habuka, H. / Katsumi, Y. / Miura, Y. et al. | British Library Online Contents | 2009

Sliding wear of silicon carbide modified by etching with chlorine at various temperatures

Choi, H. J. / Bae, H. T. / Lee, J. K. et al. | British Library Online Contents | 2009

Sliding wear of silicon carbide modified by etching with chlorine at various temperatures

Choi, H. J. / Bae, H. T. / Lee, J. K. et al. | British Library Online Contents | 2009