Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering: Fid-Bau Portal

Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

Wang, Meihan / Lei, Hao / Wen, Jiaxing / Long, Haibo / Sawada, Yutaka / Hoshi, Yoichi / Uchida, Takayuki / Hou, Zhaoxia

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Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

Wang, Meihan / Lei, Hao / Wen, Jiaxing / Long, Haibo / Sawada, Yutaka / Hoshi, Yoichi / Uchida, Takayuki / Hou, Zhaoxia

Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

Wang, Meihan / Lei, Hao / Wen, Jiaxing / Long, Haibo / Sawada, Yutaka / Hoshi, Yoichi / Uchida, Takayuki / Hou, Zhaoxia

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Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

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Titel:

Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

Beteiligte:

Wang, Meihan (Autor:in) / Lei, Hao (Autor:in) / Wen, Jiaxing (Autor:in) / Long, Haibo (Autor:in) / Sawada, Yutaka (Autor:in) / Hoshi, Yoichi (Autor:in) / Uchida, Takayuki (Autor:in) / Hou, Zhaoxia (Autor:in)

Erschienen in:

Applied surface science ; 359 ; 521-525

Erscheinungsdatum:

01.01.2015

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.44

Wang, M. / Lei, H. / Wen, J. et al. | British Library Online Contents | 2015

Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

Wang, Meihan / Lei, Hao / Wen, Jiaxing et al. | British Library Online Contents | 2015

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Characteristics of indium tin oxide films deposited by bias magnetron sputtering

Sujatha, C. / Rao, G. M. / Uthanna, S. | British Library Online Contents | 2002

XPS analysis of ZnO:Ga films deposited by magnetron sputtering: Substrate bias effect

Correia, F.C. / Bundaleski, N. / Teodoro, O.M.N.D. et al. | British Library Online Contents | 2018

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