Single-Crystal SiC Resonators by Photoelectrochemical Etching

Islam, M.M. / Huang, C.F. / Zhao, F. | British Library Online Contents | 2012

Study on the photoelectrochemical etching process of semiconducting 6H-SiC wafer

Shin, M. W. / Song, J. G. | British Library Online Contents | 2002

Photoelectrochemical etching to fabricate single-crystal SiC MEMS for harsh environments

Zhao, F. / Islam, M. M. / Huang, C. F. | British Library Online Contents | 2011

Silicon nanowires fabricated by porous gold thin film assisted chemical etching and their photoelectrochemical properties

Liu, L. / Bao, X. Q. | British Library Online Contents | 2014

Through-wafer Via Etching Enabling Wafer Stacking

Chambers, A. A. / Ashraf, H. / Hopkins, J. et al. | British Library Online Contents | 2005