Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Single-Crystal SiC Resonators by Photoelectrochemical Etching
Single-Crystal SiC Resonators by Photoelectrochemical Etching
Single-Crystal SiC Resonators by Photoelectrochemical Etching
Islam, M.M. (Autor:in) / Huang, C.F. (Autor:in) / Zhao, F. (Autor:in)
MATERIALS SCIENCE FORUM ; 717/720 ; 529-532
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Photoelectrochemical etching to fabricate single-crystal SiC MEMS for harsh environments
| British Library Online Contents | 2011
Enhanced photoelectrochemical performance of Si nanowires by etching a single-crystal Si(100) wafer
| British Library Online Contents | 2018
Porous n-silicon produced by photoelectrochemical etching
| British Library Online Contents | 1993
Structural properties of porous In0.08Ga0.92N synthesized using photoelectrochemical etching
| British Library Online Contents | 2013
| British Library Online Contents | 2003