Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator: Fid-Bau Portal

Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

Jin, Hyun Soo / Cho, Young Jin / Lee, Sang-Moon / Kim, Dae Hyun / Kim, Dae Woong / Lee, Dongsoo / Park, Jong-Bong / Won, Jeong Yeon / Lee, Myoung-Jae / Cho, Seong-Ho / ... [mehr]

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Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

Jin, Hyun Soo / Cho, Young Jin / Lee, Sang-Moon / Kim, Dae Hyun / Kim, Dae Woong / Lee, Dongsoo / Park, Jong-Bong / Won, Jeong Yeon / Lee, Myoung-Jae / Cho, Seong-Ho / ... [mehr]

Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

Jin, Hyun Soo / Cho, Young Jin / Lee, Sang-Moon / Kim, Dae Hyun / Kim, Dae Woong / Lee, Dongsoo / Park, Jong-Bong / Won, Jeong Yeon / Lee, Myoung-Jae / Cho, Seong-Ho / ... [mehr]

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Titel:

Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

Beteiligte:

Jin, Hyun Soo (Autor:in) / Cho, Young Jin (Autor:in) / Lee, Sang-Moon (Autor:in) / Kim, Dae Hyun (Autor:in) / Kim, Dae Woong (Autor:in) / Lee, Dongsoo (Autor:in) / Park, Jong-Bong (Autor:in) / Won, Jeong Yeon (Autor:in) / Lee, Myoung-Jae (Autor:in) / Cho, Seong-Ho (Autor:in)

Erschienen in:

Applied surface science ; 315 ; 178-183

Erscheinungsdatum:

01.01.2014

Format / Umfang:

6 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.44

Jin, H. S. / Cho, Y. J. / Lee, S. M. et al. | British Library Online Contents | 2014

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