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    Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

    New search for: Jin, Hyun Soo
    New search for: Cho, Young Jin
    New search for: Lee, Sang-Moon
    New search for: Kim, Dae Hyun
    New search for: Kim, Dae Woong
    New search for: Lee, Dongsoo
    New search for: Park, Jong-Bong
    New search for: Won, Jeong Yeon
    New search for: Lee, Myoung-Jae
    New search for: Cho, Seong-Ho
    New search for: Hwang, Cheol Seong
    New search for: Park, Tae Joo

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    Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

    New search for: Jin, Hyun Soo
    New search for: Cho, Young Jin
    New search for: Lee, Sang-Moon
    New search for: Kim, Dae Hyun
    New search for: Kim, Dae Woong
    New search for: Lee, Dongsoo
    New search for: Park, Jong-Bong
    New search for: Won, Jeong Yeon
    New search for: Lee, Myoung-Jae
    New search for: Cho, Seong-Ho
    New search for: Hwang, Cheol Seong
    New search for: Park, Tae Joo

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

    New search for: Jin, Hyun Soo
    New search for: Cho, Young Jin
    New search for: Lee, Sang-Moon
    New search for: Kim, Dae Hyun
    New search for: Kim, Dae Woong
    New search for: Lee, Dongsoo
    New search for: Park, Jong-Bong
    New search for: Won, Jeong Yeon
    New search for: Lee, Myoung-Jae
    New search for: Cho, Seong-Ho
    New search for: Hwang, Cheol Seong
    New search for: Park, Tae Joo

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Interface sulfur passivation using H2S annealing for atomic-layer-deposited Al2O3 films on an ultrathin-body In0.53Ga0.47As-on-insulator

    Contributors:

    Jin, Hyun Soo (author) / Cho, Young Jin (author) / Lee, Sang-Moon (author) / Kim, Dae Hyun (author) / Kim, Dae Woong (author) / Lee, Dongsoo (author) / Park, Jong-Bong (author) / Won, Jeong Yeon (author) / Lee, Myoung-Jae (author) / Cho, Seong-Ho (author)

    Published in:

    Applied surface science ; 315 ; 178-183

    Publication date:

    2014-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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