Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Estimation of boron diffusion induced residual stress in silicon by wafer curvature technique
Estimation of boron diffusion induced residual stress in silicon by wafer curvature technique
Estimation of boron diffusion induced residual stress in silicon by wafer curvature technique
Dutta, Shankar (Autor:in) / Pandey, Akhilesh (Autor:in) / Singh, Milap (Autor:in) / Pal, Ramjay (Autor:in)
MATERIALS LETTERS ; 164 ; 316-319
01.01.2016
4 pages
Aufsatz (Zeitschrift)
Unbekannt
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