Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-compactness titanium oxide target material and preparation method thereof
The invention relates to a high-compactness titanium oxide target material. The target material is prepared by using the following materials by mass percent: 97.5-99.5 percent of titanium oxide powder and 0.5-2.5 percent of activator columbium powder. The titanium oxide target material has the density of equal to or more than 4.15 g/cm<3> and the relative density of equal to or more than 98.8%, is compact and homogenous, and has no pits. The target material is prepared according to the steps of mixing, sintering pretreatment at normal pressure and vacuum hot-press sintering, and the preparation method has the advantages of short production period, high efficiency, low energy consumption and low cost.
High-compactness titanium oxide target material and preparation method thereof
The invention relates to a high-compactness titanium oxide target material. The target material is prepared by using the following materials by mass percent: 97.5-99.5 percent of titanium oxide powder and 0.5-2.5 percent of activator columbium powder. The titanium oxide target material has the density of equal to or more than 4.15 g/cm<3> and the relative density of equal to or more than 98.8%, is compact and homogenous, and has no pits. The target material is prepared according to the steps of mixing, sintering pretreatment at normal pressure and vacuum hot-press sintering, and the preparation method has the advantages of short production period, high efficiency, low energy consumption and low cost.
High-compactness titanium oxide target material and preparation method thereof
CUI NA (Autor:in) / WANG TONGDAO (Autor:in) / KANG MINGSHENG (Autor:in) / ZHU HUI (Autor:in) / WU JIE (Autor:in) / YAN LI NA (Autor:in)
29.04.2015
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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