Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-conductivity titanium oxide target material and preparation method thereof
The invention provides a high-conductivity titanium oxide target material and a preparation method thereof, and belongs to the field of semiconductor photoelectric materials. The method comprises the following steps: mixing niobium oxide powder and titanium oxide powder, adding a dispersing agent and water, ball-milling, drying and grinding to obtain mixed powder particles; and then calcining, sieving, carrying out vacuum hot pressed sintering, cooling, and then carrying out machining post-treatment. The target material comprises the following components in percentage by mass: 90-99% of TiO2 and 1-10% of Nb2O5, and the impurity content is less than or equal to 0.01%. The preparation method has the advantages of easily available raw materials and simple process operation, and can complete large-scale industrial production by using conventional vacuum hot pressing sintering and processing equipment. Meanwhile, the obtained target material can be used as a thin film raw material for a solar cell photoelectric device and a display screen, and is good in conductivity, uniform and fine in internal structure grain, high in purity, high in density, free of gap defects, not prone to cracking and excellent in machining performance; and the conductivity and the light transmittance of the film layer can be improved while the good film coating performance is met.
本发明提供一种高导电性氧化钛靶材及其制备方法，属于半导体光电材料领域。该方法为：将氧化铌和氧化钛粉末混合后加入分散剂和水，球磨、烘干研磨后得到混合粉末颗粒；随后进行煅烧、过筛处理、真空热压烧结，冷却后进行机加工后处理即得。以质量百分比计，所得靶材包括90～99％的TiO2和1～10％的Nb2O5，杂质含量≦0.01％。制备方法原料易得，工艺操作简单，使用常规真空热压烧结及加工设备就能完成大规模的工业化生产。同时所得靶材可用作太阳能电池光电器件和显示屏用的薄膜原材料，导电性良好，内部组织晶粒均匀且细小、纯度高、致密度高，不存在间隙缺陷，不容易开裂，机加工性能优良；在满足良好的镀膜性能的同时，有利改善膜层的导电性和透光率。
High-conductivity titanium oxide target material and preparation method thereof
The invention provides a high-conductivity titanium oxide target material and a preparation method thereof, and belongs to the field of semiconductor photoelectric materials. The method comprises the following steps: mixing niobium oxide powder and titanium oxide powder, adding a dispersing agent and water, ball-milling, drying and grinding to obtain mixed powder particles; and then calcining, sieving, carrying out vacuum hot pressed sintering, cooling, and then carrying out machining post-treatment. The target material comprises the following components in percentage by mass: 90-99% of TiO2 and 1-10% of Nb2O5, and the impurity content is less than or equal to 0.01%. The preparation method has the advantages of easily available raw materials and simple process operation, and can complete large-scale industrial production by using conventional vacuum hot pressing sintering and processing equipment. Meanwhile, the obtained target material can be used as a thin film raw material for a solar cell photoelectric device and a display screen, and is good in conductivity, uniform and fine in internal structure grain, high in purity, high in density, free of gap defects, not prone to cracking and excellent in machining performance; and the conductivity and the light transmittance of the film layer can be improved while the good film coating performance is met.
本发明提供一种高导电性氧化钛靶材及其制备方法，属于半导体光电材料领域。该方法为：将氧化铌和氧化钛粉末混合后加入分散剂和水，球磨、烘干研磨后得到混合粉末颗粒；随后进行煅烧、过筛处理、真空热压烧结，冷却后进行机加工后处理即得。以质量百分比计，所得靶材包括90～99％的TiO2和1～10％的Nb2O5，杂质含量≦0.01％。制备方法原料易得，工艺操作简单，使用常规真空热压烧结及加工设备就能完成大规模的工业化生产。同时所得靶材可用作太阳能电池光电器件和显示屏用的薄膜原材料，导电性良好，内部组织晶粒均匀且细小、纯度高、致密度高，不存在间隙缺陷，不容易开裂，机加工性能优良；在满足良好的镀膜性能的同时，有利改善膜层的导电性和透光率。
High-conductivity titanium oxide target material and preparation method thereof
一种高导电性氧化钛靶材及其制备方法
GUAN ZEHAN (Autor:in) / ZHOU XIANJIE (Autor:in) / HUANG YONGBIAO (Autor:in)
30.05.2023
Patent
Elektronische Ressource
Chinesisch
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