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Aluminum-neodymium-indium-zinc oxide rotating target and preparation method thereof
The invention discloses a preparation method of an aluminum-neodymium-indium-zinc oxide rotating target. The preparation method comprises the following steps: S1, adding aluminum oxide, neodymium oxide, indium oxide and zinc oxide into water and a binder, performing uniform stirring, and performing sanding to obtain slurry; S2, performing spray drying on the slurry obtained in the step S1 to obtain granulated powder; S3, performing isostatic cool pressing on the granulated powder obtained in the step S2 to obtain a rotating target biscuit; S4, refining the rotating target biscuit, and performing degreasing and sintering to obtain a sintered blank; S5, bonding the sintered blank with a metal back tube to obtain an aluminum-neodymium-indium-zinc oxide rotating target. The invention disclosesan aluminum-neodymium-indium-zinc oxide rotating target. The prepared rotating target has the advantages of high purity, high density and small crystal grains, and is used for G2.5-G11 generation line metal oxide TFT-LCD and TFT-OLED.
本发明公开了一种铝钕铟锌氧化物旋转靶的制备方法，包括如下步骤：S1、将氧化铝、氧化钕、氧化铟、氧化锌加入水、粘结剂搅拌均匀、砂磨得到浆料；S2、将步骤S1所得浆料喷雾干燥得到造粒粉；S3、将步骤S2所得造粒粉冷等静压成型，得到旋转靶素坯；S4、将旋转靶素坯精修后脱脂烧结得到烧结坯；S5、将烧结坯与金属背管邦定得到铝钕铟锌氧化物旋转靶；本发明公开了一种铝钕铟锌氧化物旋转靶。本发明制得的旋转靶具有纯度高，密度高，晶粒小的优点，用于G2.5‑G11代线金属氧化物TFT‑LCD及TFT‑OLED。
Aluminum-neodymium-indium-zinc oxide rotating target and preparation method thereof
The invention discloses a preparation method of an aluminum-neodymium-indium-zinc oxide rotating target. The preparation method comprises the following steps: S1, adding aluminum oxide, neodymium oxide, indium oxide and zinc oxide into water and a binder, performing uniform stirring, and performing sanding to obtain slurry; S2, performing spray drying on the slurry obtained in the step S1 to obtain granulated powder; S3, performing isostatic cool pressing on the granulated powder obtained in the step S2 to obtain a rotating target biscuit; S4, refining the rotating target biscuit, and performing degreasing and sintering to obtain a sintered blank; S5, bonding the sintered blank with a metal back tube to obtain an aluminum-neodymium-indium-zinc oxide rotating target. The invention disclosesan aluminum-neodymium-indium-zinc oxide rotating target. The prepared rotating target has the advantages of high purity, high density and small crystal grains, and is used for G2.5-G11 generation line metal oxide TFT-LCD and TFT-OLED.
本发明公开了一种铝钕铟锌氧化物旋转靶的制备方法，包括如下步骤：S1、将氧化铝、氧化钕、氧化铟、氧化锌加入水、粘结剂搅拌均匀、砂磨得到浆料；S2、将步骤S1所得浆料喷雾干燥得到造粒粉；S3、将步骤S2所得造粒粉冷等静压成型，得到旋转靶素坯；S4、将旋转靶素坯精修后脱脂烧结得到烧结坯；S5、将烧结坯与金属背管邦定得到铝钕铟锌氧化物旋转靶；本发明公开了一种铝钕铟锌氧化物旋转靶。本发明制得的旋转靶具有纯度高，密度高，晶粒小的优点，用于G2.5‑G11代线金属氧化物TFT‑LCD及TFT‑OLED。
Aluminum-neodymium-indium-zinc oxide rotating target and preparation method thereof
一种铝钕铟锌氧化物旋转靶及其制备方法
WEN HONGFU (Autor:in)
15.12.2020
Patent
Elektronische Ressource
Chinesisch
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