Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Indium zinc oxide evaporation target material and preparation method thereof
The invention relates to the technical field of target production, and discloses an indium zinc oxide evaporation target preparation method, which comprises: adding a dispersant, a binder, zinc oxide powder and indium oxide powder into pure water, and mixing to obtain a mixed slurry; carrying out spray granulation on the mixed slurry to obtain IZO powder; then the IZO powder is laid in a graphite boat, primary sintering and sieving are carried out, and IZO powder obtained after primary sintering is obtained; and finally, deionized water is added into the IZO powder obtained after primary sintering for wetting, mold pressing and secondary sintering are conducted, and the indium zinc oxide evaporation target material is obtained. The indium zinc oxide evaporation target material prepared through the method has high relative density and conductivity and can be directly used for evaporation, and in addition, the invention further discloses the indium zinc oxide evaporation target material.
本发明涉及靶材生产技术领域，公开了一种氧化铟锌蒸镀靶材的制备方法，该方法先将分散剂、粘结剂、氧化锌粉末、氧化铟粉末加入纯水中混合，得到混合浆料；再将混合浆料喷雾制粒，得到IZO粉末；随后将IZO粉末铺入石墨舟、一次烧结、过筛，得到一次烧结后的IZO粉末；最后向一次烧结后的IZO粉末添加去离子水润湿、模压、二次烧结，得到氧化铟锌蒸镀靶材；通过上述方法制得的氧化铟锌蒸镀靶材，不仅拥有较高的相对密度和电导率，并且可以直接用于蒸镀使用，此外，本申请还公开了一种氧化铟锌蒸镀靶材。
Indium zinc oxide evaporation target material and preparation method thereof
The invention relates to the technical field of target production, and discloses an indium zinc oxide evaporation target preparation method, which comprises: adding a dispersant, a binder, zinc oxide powder and indium oxide powder into pure water, and mixing to obtain a mixed slurry; carrying out spray granulation on the mixed slurry to obtain IZO powder; then the IZO powder is laid in a graphite boat, primary sintering and sieving are carried out, and IZO powder obtained after primary sintering is obtained; and finally, deionized water is added into the IZO powder obtained after primary sintering for wetting, mold pressing and secondary sintering are conducted, and the indium zinc oxide evaporation target material is obtained. The indium zinc oxide evaporation target material prepared through the method has high relative density and conductivity and can be directly used for evaporation, and in addition, the invention further discloses the indium zinc oxide evaporation target material.
本发明涉及靶材生产技术领域，公开了一种氧化铟锌蒸镀靶材的制备方法，该方法先将分散剂、粘结剂、氧化锌粉末、氧化铟粉末加入纯水中混合，得到混合浆料；再将混合浆料喷雾制粒，得到IZO粉末；随后将IZO粉末铺入石墨舟、一次烧结、过筛，得到一次烧结后的IZO粉末；最后向一次烧结后的IZO粉末添加去离子水润湿、模压、二次烧结，得到氧化铟锌蒸镀靶材；通过上述方法制得的氧化铟锌蒸镀靶材，不仅拥有较高的相对密度和电导率，并且可以直接用于蒸镀使用，此外，本申请还公开了一种氧化铟锌蒸镀靶材。
Indium zinc oxide evaporation target material and preparation method thereof
一种氧化铟锌蒸镀靶材及其制备方法
GU DESHENG (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / LUO SISHI (Autor:in) / ZHANG XINGYU (Autor:in)
14.11.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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