Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Aluminum-scandium nitride target material and preparation method thereof
The invention discloses an aluminum-scandium nitride target material and a preparation method thereof. The aluminum-scandium nitride target material comprises at least two components of aluminum nitride, scandium nitride, aluminum-scandium nitride and elemental scandium, the atomic percentage of scandium is 5-40%, the atomic percentage of aluminum is 20-50%, and the balance is nitrogen; The plane size of the aluminum scandium nitride target material is not less than 1 * 10 <3> mm <2>, the impurity oxygen content is less than 600ppm, the total content of other impurities is less than 500ppm, the relative density is greater than 98%, and the average grain size is less than 100[mu]m. According to the preparation method, through the technological processes of burdening, blank preparation, temperature equalization treatment and aftertreatment and in combination with the effect of an additive, aluminum nitride and scandium nitride can be effectively sintered to form a compact aluminum-scandium nitride sintered body, and finally the aluminum-scandium nitride target material with low oxygen content, uniform components and high compactness is obtained.
本发明公开了一种氮化铝钪靶材及其制备方法，包括氮化铝、氮化钪、氮化铝钪和单质钪中至少两种组元，其中钪的原子百分比为5～40％，铝的原子百分比为20～50％，余量为氮；所述氮化铝钪靶材的平面尺寸不低于1×103mm2，杂质氧含量小于600ppm，其它杂质含量总和小于500ppm，相对密度大于98％，平均晶粒尺寸小于100μm。本发明通过配料、制坯、均温处理和后处理的工艺流程，并结合添加剂的作用，氮化铝和氮化钪可有效烧结，成为致密的氮化铝钪烧结体，最终得到氧含量低、成分均匀和致密性高的氮化铝钪靶材。
Aluminum-scandium nitride target material and preparation method thereof
The invention discloses an aluminum-scandium nitride target material and a preparation method thereof. The aluminum-scandium nitride target material comprises at least two components of aluminum nitride, scandium nitride, aluminum-scandium nitride and elemental scandium, the atomic percentage of scandium is 5-40%, the atomic percentage of aluminum is 20-50%, and the balance is nitrogen; The plane size of the aluminum scandium nitride target material is not less than 1 * 10 <3> mm <2>, the impurity oxygen content is less than 600ppm, the total content of other impurities is less than 500ppm, the relative density is greater than 98%, and the average grain size is less than 100[mu]m. According to the preparation method, through the technological processes of burdening, blank preparation, temperature equalization treatment and aftertreatment and in combination with the effect of an additive, aluminum nitride and scandium nitride can be effectively sintered to form a compact aluminum-scandium nitride sintered body, and finally the aluminum-scandium nitride target material with low oxygen content, uniform components and high compactness is obtained.
本发明公开了一种氮化铝钪靶材及其制备方法，包括氮化铝、氮化钪、氮化铝钪和单质钪中至少两种组元，其中钪的原子百分比为5～40％，铝的原子百分比为20～50％，余量为氮；所述氮化铝钪靶材的平面尺寸不低于1×103mm2，杂质氧含量小于600ppm，其它杂质含量总和小于500ppm，相对密度大于98％，平均晶粒尺寸小于100μm。本发明通过配料、制坯、均温处理和后处理的工艺流程，并结合添加剂的作用，氮化铝和氮化钪可有效烧结，成为致密的氮化铝钪烧结体，最终得到氧含量低、成分均匀和致密性高的氮化铝钪靶材。
Aluminum-scandium nitride target material and preparation method thereof
一种氮化铝钪靶材及其制备方法
QIU CONGZHANG (Autor:in)
30.04.2021
Patent
Elektronische Ressource
Chinesisch
METHOD OF MANUFACTURING SCANDIUM ALUMINUM NITRIDE TARGET FOR PLD
| Europäisches Patentamt | 2022
Method for producing scandium-aluminum nitride target for PLD
| Europäisches Patentamt | 2022
METHOD FOR PRODUCING A SCANDIUM ALUMINUM NITRIDE TARGET FOR PLD
| Europäisches Patentamt | 2023
Silicon nitride-aluminum nitride/polymer composite material and preparation method thereof
| Europäisches Patentamt | 2024
| Europäisches Patentamt | 2021