Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Clean workshop for silicon carbide semiconductor production
The invention belongs to the technical field of workshops, and particularly relates to a clean workshop for silicon carbide semiconductor production. The clean workshop comprises ground, wherein the top of the ground is fixedly connected to a workshop body; the interior of the workshop body is fixedly connected to a baffle plate; the top of the baffle plate is fixedly connected to a purification box; the top of the baffle plate is fixedly connected to a suction fan; the input end of the suction fan is communicated with the workshop body; the output end of the suction fan is communicated with the purification box; and the inner wall of the purification box is fixedly connected to a clamping plate. Through the arrangement of the suction fan, air can be sucked into the purification box, the sterilization effect of a first activated carbon sterilization net and a second activated carbon sterilization net is utilized, the air is purified, the workshop quality is improved, the adsorption effect of a dust screen is matched, dust can be removed, the purification effect is further enhanced, and through bolts, the dust screen, the first activated carbon sterilization net and the second activated carbon sterilization net are detachable.
本发明属于厂房技术领域，尤其为一种碳化硅半导体生产用的洁净厂房，包括地面，所述地面的顶部固定连接有厂房本体，所述厂房本体的内部固定连接有挡板，所述挡板的顶部固定连接有净化箱，所述挡板的顶部固定连接有吸风机，所述吸风机的输入端与厂房本体连通，所述吸风机的输出端与净化箱连通，所述净化箱的内壁固定连接有夹板。本发明通过吸风机的设置，可将空气吸入净化箱内，利用第一活性炭杀菌网和第二活性炭杀菌网的灭菌作用，对空气进行净化，增加厂房质量，配合防尘网的吸附效果，可将灰尘进行去除，进一步加强净化效果，通过螺栓，使防尘网、第一活性炭杀菌网和第二活性炭杀菌网可以拆卸。
Clean workshop for silicon carbide semiconductor production
The invention belongs to the technical field of workshops, and particularly relates to a clean workshop for silicon carbide semiconductor production. The clean workshop comprises ground, wherein the top of the ground is fixedly connected to a workshop body; the interior of the workshop body is fixedly connected to a baffle plate; the top of the baffle plate is fixedly connected to a purification box; the top of the baffle plate is fixedly connected to a suction fan; the input end of the suction fan is communicated with the workshop body; the output end of the suction fan is communicated with the purification box; and the inner wall of the purification box is fixedly connected to a clamping plate. Through the arrangement of the suction fan, air can be sucked into the purification box, the sterilization effect of a first activated carbon sterilization net and a second activated carbon sterilization net is utilized, the air is purified, the workshop quality is improved, the adsorption effect of a dust screen is matched, dust can be removed, the purification effect is further enhanced, and through bolts, the dust screen, the first activated carbon sterilization net and the second activated carbon sterilization net are detachable.
本发明属于厂房技术领域，尤其为一种碳化硅半导体生产用的洁净厂房，包括地面，所述地面的顶部固定连接有厂房本体，所述厂房本体的内部固定连接有挡板，所述挡板的顶部固定连接有净化箱，所述挡板的顶部固定连接有吸风机，所述吸风机的输入端与厂房本体连通，所述吸风机的输出端与净化箱连通，所述净化箱的内壁固定连接有夹板。本发明通过吸风机的设置，可将空气吸入净化箱内，利用第一活性炭杀菌网和第二活性炭杀菌网的灭菌作用，对空气进行净化，增加厂房质量，配合防尘网的吸附效果，可将灰尘进行去除，进一步加强净化效果，通过螺栓，使防尘网、第一活性炭杀菌网和第二活性炭杀菌网可以拆卸。
Clean workshop for silicon carbide semiconductor production
一种碳化硅半导体生产用的洁净厂房
LU YU (Autor:in) / WANG YI (Autor:in) / LIU YULIANG (Autor:in) / JIANG JINGLI (Autor:in) / TAN DASHENG (Autor:in)
14.05.2021
Patent
Elektronische Ressource
Chinesisch
Manufacturing method for clean type silicon carbide substrate
| Europäisches Patentamt | 2024
SILICON CARBIDE PRODUCTION METHOD AND SILICON CARBIDE COMPOSITE MATERIAL
| Europäisches Patentamt | 2019
SILICON CARBIDE PRODUCTION METHOD AND SILICON CARBIDE COMPOSITE MATERIAL
| Europäisches Patentamt | 2019