Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ITO powder prepared by recovering ITO waste target blank, target material and preparation method of ITO powder and target material
The invention discloses ITO powder prepared by recovering an ITO waste target blank, a target material and a preparation method of the target material, and belongs to the field of target material recovery and preparation. According to the method for preparing the ITO powder by recycling the ITO waste target blank, the ITO waste target blank is smashed to be in the specific particle size, then redundant additive impurities in the powder are removed through heat treatment, finally, the powder is mixed with a ball-milling auxiliary agent according to the proportion, ball-milling powder preparation is conducted, and the obtained product is uniform in particle and high in density; the method does not need to add additional new powder raw materials, and is simple in operation steps, low in equipment requirement, high in production efficiency and yield and low in preparation cost. The invention also discloses the ITO powder prepared by the method. The invention also discloses a method for preparing the ITO target material by recovering the ITO waste target blank.
本发明公开了一种ITO废靶坯回收制备的ITO粉末、靶材及其制备方法，属于靶材回收及制备领域。本发明所述ITO废靶坯回收制备ITO粉末的方法先将ITO废靶坯粉碎至特定颗粒尺寸，随后经过热处理去除粉末中多余的添加剂杂质，最后与球磨助剂按比例混合后进行球磨制粉，所得产品颗粒均匀且密度较高；所述方法无需添加额外新粉原料，操作步骤简单，设备要求低，生产效率及得率高，制备成本低廉。本发明还公开了由所述方法制备的ITO粉末；本发明还公开了一种ITO废靶坯回收制备ITO靶材的方法。
ITO powder prepared by recovering ITO waste target blank, target material and preparation method of ITO powder and target material
The invention discloses ITO powder prepared by recovering an ITO waste target blank, a target material and a preparation method of the target material, and belongs to the field of target material recovery and preparation. According to the method for preparing the ITO powder by recycling the ITO waste target blank, the ITO waste target blank is smashed to be in the specific particle size, then redundant additive impurities in the powder are removed through heat treatment, finally, the powder is mixed with a ball-milling auxiliary agent according to the proportion, ball-milling powder preparation is conducted, and the obtained product is uniform in particle and high in density; the method does not need to add additional new powder raw materials, and is simple in operation steps, low in equipment requirement, high in production efficiency and yield and low in preparation cost. The invention also discloses the ITO powder prepared by the method. The invention also discloses a method for preparing the ITO target material by recovering the ITO waste target blank.
本发明公开了一种ITO废靶坯回收制备的ITO粉末、靶材及其制备方法，属于靶材回收及制备领域。本发明所述ITO废靶坯回收制备ITO粉末的方法先将ITO废靶坯粉碎至特定颗粒尺寸，随后经过热处理去除粉末中多余的添加剂杂质，最后与球磨助剂按比例混合后进行球磨制粉，所得产品颗粒均匀且密度较高；所述方法无需添加额外新粉原料，操作步骤简单，设备要求低，生产效率及得率高，制备成本低廉。本发明还公开了由所述方法制备的ITO粉末；本发明还公开了一种ITO废靶坯回收制备ITO靶材的方法。
ITO powder prepared by recovering ITO waste target blank, target material and preparation method of ITO powder and target material
一种ITO废靶坯回收制备的ITO粉末、靶材及其制备方法
ZHANG LAIWEN (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / ZHU LIU (Autor:in)
23.07.2021
Patent
Elektronische Ressource
Chinesisch
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