Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc oxide titanium yttrium powder, target material and preparation method of powder and target material
The invention belongs to the technical field of oxide target materials, and discloses zinc-titanium-yttrium oxide powder, a zinc-titanium-yttrium oxide target material and a preparation method of the zinc-titanium-yttrium oxide powder and the zinc-titanium-yttrium oxide target material, the preparation method comprises the following steps: step 1, mixing yttrium oxide powder, titanium oxide powder, pure water and a first dispersing agent, pre-dispersing, and performing wet grinding to obtain slurry I; 2, adding zinc oxide powder, pure water and a second dispersing agent into the slurry I, mixing, pre-dispersing, and performing wet grinding to obtain slurry II; 3, adding a binder into the slurry II, mixing, pre-dispersing, and performing wet grinding to obtain slurry III; 4, the third slurry is sequentially subjected to gas-water combined atomization granulation, mixing and screening, and zinc oxide titanium yttrium powder is obtained; wherein the gas atomization pressure of the gas-water combined atomization granulation in the step 4 is 0.6-0.8 MPa, and the included angle between the gas injection direction and the vertical downward direction is 30-50 degrees; the water pressure of water atomization is 50-150 MPa, and the included angle between the water spraying direction and the vertical downward direction is 30-50 degrees.
本发明属于氧化物靶材技术领域，公开了一种氧化锌钛钇粉体、靶材及粉体、靶材的制备方法，该制备方法包括如下步骤：步骤1：将氧化钇粉末、氧化钛粉末、纯水和第一分散剂经过混合、预分散后进行湿法研磨得到浆料一；步骤2：向浆料一中加入氧化锌粉末、纯水和第二分散剂经过混合、预分散后进行湿法研磨得到浆料二；步骤3：向浆料二中加入粘结剂经过混合、预分散后进行湿法研磨得到浆料三；步骤4：将浆料三依次进行气水联合雾化造粒、混料和筛分，得到氧化锌钛钇粉体；其中所述步骤4中气水联合雾化造粒的气雾化的气压为0.6‑0.8MPa，气体喷射方向与竖直向下方向的夹角为30‑50°；水雾化的水压为50‑150MPa，水的喷射方向与竖直向下方向的夹角为30‑50°。
Zinc oxide titanium yttrium powder, target material and preparation method of powder and target material
The invention belongs to the technical field of oxide target materials, and discloses zinc-titanium-yttrium oxide powder, a zinc-titanium-yttrium oxide target material and a preparation method of the zinc-titanium-yttrium oxide powder and the zinc-titanium-yttrium oxide target material, the preparation method comprises the following steps: step 1, mixing yttrium oxide powder, titanium oxide powder, pure water and a first dispersing agent, pre-dispersing, and performing wet grinding to obtain slurry I; 2, adding zinc oxide powder, pure water and a second dispersing agent into the slurry I, mixing, pre-dispersing, and performing wet grinding to obtain slurry II; 3, adding a binder into the slurry II, mixing, pre-dispersing, and performing wet grinding to obtain slurry III; 4, the third slurry is sequentially subjected to gas-water combined atomization granulation, mixing and screening, and zinc oxide titanium yttrium powder is obtained; wherein the gas atomization pressure of the gas-water combined atomization granulation in the step 4 is 0.6-0.8 MPa, and the included angle between the gas injection direction and the vertical downward direction is 30-50 degrees; the water pressure of water atomization is 50-150 MPa, and the included angle between the water spraying direction and the vertical downward direction is 30-50 degrees.
本发明属于氧化物靶材技术领域，公开了一种氧化锌钛钇粉体、靶材及粉体、靶材的制备方法，该制备方法包括如下步骤：步骤1：将氧化钇粉末、氧化钛粉末、纯水和第一分散剂经过混合、预分散后进行湿法研磨得到浆料一；步骤2：向浆料一中加入氧化锌粉末、纯水和第二分散剂经过混合、预分散后进行湿法研磨得到浆料二；步骤3：向浆料二中加入粘结剂经过混合、预分散后进行湿法研磨得到浆料三；步骤4：将浆料三依次进行气水联合雾化造粒、混料和筛分，得到氧化锌钛钇粉体；其中所述步骤4中气水联合雾化造粒的气雾化的气压为0.6‑0.8MPa，气体喷射方向与竖直向下方向的夹角为30‑50°；水雾化的水压为50‑150MPa，水的喷射方向与竖直向下方向的夹角为30‑50°。
Zinc oxide titanium yttrium powder, target material and preparation method of powder and target material
一种氧化锌钛钇粉体、靶材及粉体、靶材的制备方法
GU DESHENG (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / ZHANG XINGYU (Autor:in) / LUO SISHI (Autor:in)
08.12.2023
Patent
Elektronische Ressource
Chinesisch
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