Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Sintering method of target material
The invention relates to a sintering method of a target material, which is characterized in that spherical granular alumina powder is used as auxiliary sliding powder, the target material is sintered on the spherical granular alumina powder, and compared with sintering on irregular-shaped alumina powder, the alumina powder is easier to roll even if a target material green body is heavier in weight while contracts, and the contact friction force between the target material and a load bearing plate is converted into rolling friction force, so that the friction resistance generated when the target material green body shrinks is reduced, and irregular deformation and cracking of the target material caused by the friction resistance are prevented.
本发明涉及一种靶材的烧结方法，采用球形颗粒状的氧化铝粉作为辅助滑动粉，把靶材放置在球形颗粒状的氧化铝上进行烧结，相比放置在不规则形状的氧化铝粉上进行烧结，即使靶材生坯重量较大，收缩时该氧化铝粉也更容易发生滚动，将靶材与承烧板之间的接触摩擦力转变为滚动摩擦力，减小靶材生坯收缩时产生的摩擦阻力，防止由摩擦阻力导致的靶材不规则变形和开裂。
Sintering method of target material
The invention relates to a sintering method of a target material, which is characterized in that spherical granular alumina powder is used as auxiliary sliding powder, the target material is sintered on the spherical granular alumina powder, and compared with sintering on irregular-shaped alumina powder, the alumina powder is easier to roll even if a target material green body is heavier in weight while contracts, and the contact friction force between the target material and a load bearing plate is converted into rolling friction force, so that the friction resistance generated when the target material green body shrinks is reduced, and irregular deformation and cracking of the target material caused by the friction resistance are prevented.
本发明涉及一种靶材的烧结方法，采用球形颗粒状的氧化铝粉作为辅助滑动粉，把靶材放置在球形颗粒状的氧化铝上进行烧结，相比放置在不规则形状的氧化铝粉上进行烧结，即使靶材生坯重量较大，收缩时该氧化铝粉也更容易发生滚动，将靶材与承烧板之间的接触摩擦力转变为滚动摩擦力，减小靶材生坯收缩时产生的摩擦阻力，防止由摩擦阻力导致的靶材不规则变形和开裂。
Sintering method of target material
一种靶材的烧结方法
ZHOU ZHAOYU (Autor:in) / ZHOU ZHIHONG (Autor:in) / XIAO SHIHONG (Autor:in) / LEI YU (Autor:in) / WANG ZHENGJUN (Autor:in)
10.09.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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