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Efficient heat dissipation composite ceramic substrate and preparation method thereof
The invention discloses an efficient heat dissipation composite ceramic substrate and a preparation method thereof. The structure of the composite ceramic substrate is SrAl12O19 ceramic/Al2O3 ceramic/SrAl12O19 ceramic. The preparation method comprises the steps: respectively preparing an Al2O3-SrCO3 mixed powder single-layer ceramic biscuit and an Al2O3 single-layer ceramic biscuit through water-based tape casting; respectively laminating the two kinds of single-layer ceramic biscuits for 5-10 layers and 10-20 layers to form an Al2O3-SrCO3 mixed powder multilayer ceramic biscuit and an Al2O3 multilayer ceramic biscuit, then sequentially laminating the two kinds of multilayer ceramic biscuits to form a composite structure casting sheet, and placing the composite structure casting sheet at 150-300 MPa for warm isostatic pressing to obtain a composite structure ceramic biscuit; and finally, discharging glue in a muffle furnace, sintering in a vacuum furnace, annealing in the muffle furnace, and performing double-sided polishing in sequence to obtain the composite ceramic substrate. The method is simple in process, and the heat dissipation efficiency of the prepared composite ceramic substrate can be improved.
一种高效散热复合陶瓷基板及其制备方法,复合陶瓷基板的结构为SrAl12O19陶瓷/Al2O3陶瓷/SrAl12O19陶瓷。其制备方法:通过水基流延成型分别制备Al2O3‑SrCO3混合粉体单层陶瓷素坯和Al2O3单层陶瓷素坯;将这两种单层陶瓷素坯分别叠层5~10层和10~20层后形成Al2O3‑SrCO3混合粉体多层陶瓷素坯和Al2O3多层陶瓷素坯,再将这两种多层陶瓷素坯依次叠层后形成复合结构流延片,并置于150~300MPa下温等静压得复合结构陶瓷素坯;最后依次进行马弗炉中排胶、真空炉中烧结、马弗炉中退火、双面抛光得复合陶瓷基板。该方法工艺简单,能够提高所制备得到的复合陶瓷基板的散热效率。
Efficient heat dissipation composite ceramic substrate and preparation method thereof
The invention discloses an efficient heat dissipation composite ceramic substrate and a preparation method thereof. The structure of the composite ceramic substrate is SrAl12O19 ceramic/Al2O3 ceramic/SrAl12O19 ceramic. The preparation method comprises the steps: respectively preparing an Al2O3-SrCO3 mixed powder single-layer ceramic biscuit and an Al2O3 single-layer ceramic biscuit through water-based tape casting; respectively laminating the two kinds of single-layer ceramic biscuits for 5-10 layers and 10-20 layers to form an Al2O3-SrCO3 mixed powder multilayer ceramic biscuit and an Al2O3 multilayer ceramic biscuit, then sequentially laminating the two kinds of multilayer ceramic biscuits to form a composite structure casting sheet, and placing the composite structure casting sheet at 150-300 MPa for warm isostatic pressing to obtain a composite structure ceramic biscuit; and finally, discharging glue in a muffle furnace, sintering in a vacuum furnace, annealing in the muffle furnace, and performing double-sided polishing in sequence to obtain the composite ceramic substrate. The method is simple in process, and the heat dissipation efficiency of the prepared composite ceramic substrate can be improved.
一种高效散热复合陶瓷基板及其制备方法,复合陶瓷基板的结构为SrAl12O19陶瓷/Al2O3陶瓷/SrAl12O19陶瓷。其制备方法:通过水基流延成型分别制备Al2O3‑SrCO3混合粉体单层陶瓷素坯和Al2O3单层陶瓷素坯;将这两种单层陶瓷素坯分别叠层5~10层和10~20层后形成Al2O3‑SrCO3混合粉体多层陶瓷素坯和Al2O3多层陶瓷素坯,再将这两种多层陶瓷素坯依次叠层后形成复合结构流延片,并置于150~300MPa下温等静压得复合结构陶瓷素坯;最后依次进行马弗炉中排胶、真空炉中烧结、马弗炉中退火、双面抛光得复合陶瓷基板。该方法工艺简单,能够提高所制备得到的复合陶瓷基板的散热效率。
Efficient heat dissipation composite ceramic substrate and preparation method thereof
一种高效散热复合陶瓷基板及其制备方法
ZHANG LE (Autor:in) / XI XIAOQIAN (Autor:in) / ZHOU CHUNMING (Autor:in) / ZHOU TIANYUAN (Autor:in) / LI MING (Autor:in) / CHENG XIN (Autor:in) / LI YANBIN (Autor:in) / WEI SHUAI (Autor:in) / WANG ZHONGYING (Autor:in) / SHAO CEN (Autor:in)
26.10.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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