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High-thermal-conductivity and high-quality silicon nitride ceramic substrate and preparation method thereof
The invention relates to a silicon nitride ceramic substrate and a preparation method thereof, in particular to a high-heat-conductivity and high-quality silicon nitride ceramic substrate and a preparation method thereof. The invention aims to solve the problems that the thermal conductivity and the mechanical property of the silicon nitride substrate prepared by the existing method are poor, and the equipment and the manufacturing cost are high and the batch production is difficult to realize due to spark plasma sintering. The high-heat-conductivity and high-quality silicon nitride ceramic substrate is prepared from silicon nitride powder or silicon nitride powder and aluminum nitride, rare earth oxide, magnesium powder, a plasticizer and an organic solvent. The method comprises the following steps: 1, weighing; 2, grinding, mixing and granulating; 3, dry pressing molding; and 4, air pressure sintering. According to the invention, the silicon nitride ceramic substrate with high thermal conductivity and high quality can be obtained.
一种高热导率高品质氮化硅陶瓷基板及其制备方法,它涉及一种氮化硅陶瓷基板及其制备方法。本发明的目的是要解决现有方法制备的氮化硅基板的热导率和力学性能差,且使用放电等离子烧结,其设备及制造成本高昂,难以实现批量化生产的问题。一种高热导率高品质氮化硅陶瓷基板由氮化硅粉或氮化硅粉和氮化铝、稀土氧化物、镁粉、增塑剂和有机溶剂制备而成。方法:一、称料;二、研磨、混合造粒;三、干压成型;四、气压烧结。本发明可获得一种高热导率高品质氮化硅陶瓷基板。
High-thermal-conductivity and high-quality silicon nitride ceramic substrate and preparation method thereof
The invention relates to a silicon nitride ceramic substrate and a preparation method thereof, in particular to a high-heat-conductivity and high-quality silicon nitride ceramic substrate and a preparation method thereof. The invention aims to solve the problems that the thermal conductivity and the mechanical property of the silicon nitride substrate prepared by the existing method are poor, and the equipment and the manufacturing cost are high and the batch production is difficult to realize due to spark plasma sintering. The high-heat-conductivity and high-quality silicon nitride ceramic substrate is prepared from silicon nitride powder or silicon nitride powder and aluminum nitride, rare earth oxide, magnesium powder, a plasticizer and an organic solvent. The method comprises the following steps: 1, weighing; 2, grinding, mixing and granulating; 3, dry pressing molding; and 4, air pressure sintering. According to the invention, the silicon nitride ceramic substrate with high thermal conductivity and high quality can be obtained.
一种高热导率高品质氮化硅陶瓷基板及其制备方法,它涉及一种氮化硅陶瓷基板及其制备方法。本发明的目的是要解决现有方法制备的氮化硅基板的热导率和力学性能差,且使用放电等离子烧结,其设备及制造成本高昂,难以实现批量化生产的问题。一种高热导率高品质氮化硅陶瓷基板由氮化硅粉或氮化硅粉和氮化铝、稀土氧化物、镁粉、增塑剂和有机溶剂制备而成。方法:一、称料;二、研磨、混合造粒;三、干压成型;四、气压烧结。本发明可获得一种高热导率高品质氮化硅陶瓷基板。
High-thermal-conductivity and high-quality silicon nitride ceramic substrate and preparation method thereof
一种高热导率高品质氮化硅陶瓷基板及其制备方法
ZHANG MING (Autor:in) / XU BAOLONG (Autor:in) / CUI KAIQUAN (Autor:in) / LIU HAIYING (Autor:in) / HANG CHEN (Autor:in) / LI WENHUI (Autor:in)
03.12.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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