Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Quartz fiber/carbon fiber reinforced carbon-based composite material crucible and preparation method thereof
The invention provides a quartz fiber/carbon fiber reinforced carbon-based composite material crucible and a preparation method thereof, and belongs to the technical field of monocrystalline silicon furnaces and carbon-based composite material preparation. The crucible is prepared from a crucible prefabricated part through curing, shaping, chemical densification and high-temperature graphitization, wherein the middle layer of the crucible prefabricated part is made of carbon fibers, the inner surface layer and the outer surface layer of the crucible prefabricated part are made of quartz fibers, and the crucible prefabricated part is formed by alternately laminating and needling carbon fiber plain cloth or twill cloth and short carbon fiber net tires or alternately laminating and needling quartz fiber non-woven cloth and short quartz fiber net tires. The obtained quartz fiber/carbon fiber reinforced carbon-based composite material crucible is high in strength; wherein the inner surface and the outer surface consist of quartz fibers, silicon carbide interface layers and matrix carbon, so that the reaction between the inner surface layer and the outer surface layer of the crucible and silicon steam can be effectively reduced or avoided, the service life of the crucible can be prolonged by more than 50%, and the crucible is suitable for batch production of high-efficiency single crystal furnace crucibles and crucible sides.
本发明提供了一种石英纤维/炭纤维增强炭基复合材料坩埚及其制备方法，属于单晶硅炉及炭基复合材料制备技术领域。该坩埚由坩埚预制件经固化定型、化学增密、高温石墨化制备而成。坩埚预制件的中间层为炭纤维，内外表面层为石英纤维组成，分别采用炭纤维平纹布或斜纹布加短炭纤维网胎交替叠层针刺或石英纤维无纬布+短石英纤维网胎交替叠层针刺而成。所得石英纤维/炭纤维增强炭基复合材料坩埚强度高，内外表面由石英纤维+碳化硅界面层+基体炭组成，可以有效降低或避免坩埚内外表面层与硅蒸气反应，能提高坩埚的使用寿命50％以上，适合高效单晶炉坩埚、埚帮的批量生产。
Quartz fiber/carbon fiber reinforced carbon-based composite material crucible and preparation method thereof
The invention provides a quartz fiber/carbon fiber reinforced carbon-based composite material crucible and a preparation method thereof, and belongs to the technical field of monocrystalline silicon furnaces and carbon-based composite material preparation. The crucible is prepared from a crucible prefabricated part through curing, shaping, chemical densification and high-temperature graphitization, wherein the middle layer of the crucible prefabricated part is made of carbon fibers, the inner surface layer and the outer surface layer of the crucible prefabricated part are made of quartz fibers, and the crucible prefabricated part is formed by alternately laminating and needling carbon fiber plain cloth or twill cloth and short carbon fiber net tires or alternately laminating and needling quartz fiber non-woven cloth and short quartz fiber net tires. The obtained quartz fiber/carbon fiber reinforced carbon-based composite material crucible is high in strength; wherein the inner surface and the outer surface consist of quartz fibers, silicon carbide interface layers and matrix carbon, so that the reaction between the inner surface layer and the outer surface layer of the crucible and silicon steam can be effectively reduced or avoided, the service life of the crucible can be prolonged by more than 50%, and the crucible is suitable for batch production of high-efficiency single crystal furnace crucibles and crucible sides.
本发明提供了一种石英纤维/炭纤维增强炭基复合材料坩埚及其制备方法，属于单晶硅炉及炭基复合材料制备技术领域。该坩埚由坩埚预制件经固化定型、化学增密、高温石墨化制备而成。坩埚预制件的中间层为炭纤维，内外表面层为石英纤维组成，分别采用炭纤维平纹布或斜纹布加短炭纤维网胎交替叠层针刺或石英纤维无纬布+短石英纤维网胎交替叠层针刺而成。所得石英纤维/炭纤维增强炭基复合材料坩埚强度高，内外表面由石英纤维+碳化硅界面层+基体炭组成，可以有效降低或避免坩埚内外表面层与硅蒸气反应，能提高坩埚的使用寿命50％以上，适合高效单晶炉坩埚、埚帮的批量生产。
Quartz fiber/carbon fiber reinforced carbon-based composite material crucible and preparation method thereof
一种石英纤维/炭纤维增强炭基复合材料坩埚及其制备方法
CHEN TENGFEI (Autor:in)
08.02.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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