Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention belongs to the technical field of single crystal thermal field tools/parts, and particularly relates to a carbon-based composite material/quartz composite crucible. The crucible is composed of an inner layer, a middle layer and an outer layer, the inner layer is made of a high-density carbon-based composite material, the middle layer is made of a silicon dioxide material, and the outer layer is made of a carbon-based composite material. According to the invention, the layers can be designed in a separable structure and can also be designed in an integrated structure. According to the invention, the service life of the crucible in the monocrystalline silicon drawing process can be greatly prolonged, the time for replacing the quartz crucible is saved, the replacement cost of the quartz crucible is reduced, the leakage risk of a silicon melt is reduced, the quality of monocrystalline silicon is improved, and the safety of the monocrystalline silicon drawing process is improved.
本发明属于单晶热场工装/部件技术领域，具体涉及一种碳基复合材料/石英复合坩埚。所述坩埚由内层、中间层、外层构成，所述内层的材质为高致密的碳基复合材料，中间层的材质为二氧化硅材质、外层为碳基复合材料。本发明各层之间可以是可分离式结构设计，也可以是一体式结构设计。本发明能大大提高单晶硅拉制过程中坩埚使用寿命，节省出更换石英坩埚的时间，降低石英坩埚的更换成本，降低硅熔体的渗漏风险，提升单晶硅的品质，并且提高单晶硅拉制过程的安全性。
The invention belongs to the technical field of single crystal thermal field tools/parts, and particularly relates to a carbon-based composite material/quartz composite crucible. The crucible is composed of an inner layer, a middle layer and an outer layer, the inner layer is made of a high-density carbon-based composite material, the middle layer is made of a silicon dioxide material, and the outer layer is made of a carbon-based composite material. According to the invention, the layers can be designed in a separable structure and can also be designed in an integrated structure. According to the invention, the service life of the crucible in the monocrystalline silicon drawing process can be greatly prolonged, the time for replacing the quartz crucible is saved, the replacement cost of the quartz crucible is reduced, the leakage risk of a silicon melt is reduced, the quality of monocrystalline silicon is improved, and the safety of the monocrystalline silicon drawing process is improved.
本发明属于单晶热场工装/部件技术领域，具体涉及一种碳基复合材料/石英复合坩埚。所述坩埚由内层、中间层、外层构成，所述内层的材质为高致密的碳基复合材料，中间层的材质为二氧化硅材质、外层为碳基复合材料。本发明各层之间可以是可分离式结构设计，也可以是一体式结构设计。本发明能大大提高单晶硅拉制过程中坩埚使用寿命，节省出更换石英坩埚的时间，降低石英坩埚的更换成本，降低硅熔体的渗漏风险，提升单晶硅的品质，并且提高单晶硅拉制过程的安全性。
Carbon-based composite material/quartz composite crucible
一种碳基复合材料/石英复合坩埚
03.10.2023
Patent
Elektronische Ressource
Chinesisch
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