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Indium cerium titanium tantalum oxide powder and preparation method thereof
The invention discloses indium cerium titanium tantalum oxide powder and a preparation method thereof, and belongs to the field of preparation of indium cerium titanium tantalum oxide. The chemical formula of the indium cerium titanium tantalum oxide powder is In < 1-x-y-z > Ta < x > Ti < y > Ce < z > O, and the values of x, y and z are 0.001-0.2. D50 is equal to 1.28-1.54 [mu] m, D10 is greater than or equal to 0.71 [mu] m, D90 is less than or equal to 4.45 [mu] m, the particle size distribution coefficient P is equal to (D90-D10)/D50 and is less than or equal to 2.51, and the water content is 0.36%-0.55%. According to the technical scheme, the problem that components are not uniform due to the fact that large-particle-size rare metal elements are doped into indium oxide can be solved, and the cerium-titanium-tantalum indium oxide powder can be used for preparing the cerium-titanium-tantalum indium oxide target material which is high in density, uniform in structure and excellent in photoelectric specificity.
本发明公开了一种氧化铟铈钛钽粉体及其制备方法，属于铟铈钛钽氧化物的制备领域。所述氧化铟铈钛钽粉体的化学式为In1‑x‑y‑zTaxTiyCezO，其中，x、y、z的值为0.001‑0.2。D50＝1.28‑1.54μm，D10≥0.71μm，D90≤4.45μm，粒度分布系数P＝(D90‑D10)/D50≤2.51，含水量：0.36％‑0.55％。本发明的技术方案可以避免大粒径稀有金属元素掺入氧化铟引起的成分不均一的问题，该氧化铟铈钛钽粉体可以制备高密度、组织均匀及具备优异光电特异性的氧化铟铈钛钽靶材。
Indium cerium titanium tantalum oxide powder and preparation method thereof
The invention discloses indium cerium titanium tantalum oxide powder and a preparation method thereof, and belongs to the field of preparation of indium cerium titanium tantalum oxide. The chemical formula of the indium cerium titanium tantalum oxide powder is In < 1-x-y-z > Ta < x > Ti < y > Ce < z > O, and the values of x, y and z are 0.001-0.2. D50 is equal to 1.28-1.54 [mu] m, D10 is greater than or equal to 0.71 [mu] m, D90 is less than or equal to 4.45 [mu] m, the particle size distribution coefficient P is equal to (D90-D10)/D50 and is less than or equal to 2.51, and the water content is 0.36%-0.55%. According to the technical scheme, the problem that components are not uniform due to the fact that large-particle-size rare metal elements are doped into indium oxide can be solved, and the cerium-titanium-tantalum indium oxide powder can be used for preparing the cerium-titanium-tantalum indium oxide target material which is high in density, uniform in structure and excellent in photoelectric specificity.
本发明公开了一种氧化铟铈钛钽粉体及其制备方法，属于铟铈钛钽氧化物的制备领域。所述氧化铟铈钛钽粉体的化学式为In1‑x‑y‑zTaxTiyCezO，其中，x、y、z的值为0.001‑0.2。D50＝1.28‑1.54μm，D10≥0.71μm，D90≤4.45μm，粒度分布系数P＝(D90‑D10)/D50≤2.51，含水量：0.36％‑0.55％。本发明的技术方案可以避免大粒径稀有金属元素掺入氧化铟引起的成分不均一的问题，该氧化铟铈钛钽粉体可以制备高密度、组织均匀及具备优异光电特异性的氧化铟铈钛钽靶材。
Indium cerium titanium tantalum oxide powder and preparation method thereof
一种氧化铟铈钛钽粉体及其制备方法
SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / ZHANG LAIWEN (Autor:in) / WANG QIFENG (Autor:in) / LI QINGQING (Autor:in)
15.03.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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