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Plasma resistant yttrium aluminum oxide bodies

VOLKEL LUDWIG / BISTA SIMONE / DORON MICHAEL J / KENNEDY SCOTT R

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods, and from 0.1% to 4% by volume porosity as calculated from density measurement performed according to ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 [mu] m to 8 [mu] m. A method of making the sintered ceramic body is also disclosed.

本文公开了一种烧结陶瓷体，其包含如使用XRD和图像处理方法测量的从90体积％至99.9体积％的多晶钇铝石榴石(YAG)，以及如由根据ASTM B962‑17执行的密度测量计算出的从0.1％至4％的体积孔隙率。所述烧结陶瓷体可具有99.99％和更大的总纯度以及从0.3μm至8μm的晶粒大小。还公开了一种制造所述烧结陶瓷体的方法。

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Plasma resistant yttrium aluminum oxide bodies

VOLKEL LUDWIG / BISTA SIMONE / DORON MICHAEL J / KENNEDY SCOTT R

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods, and from 0.1% to 4% by volume porosity as calculated from density measurement performed according to ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 [mu] m to 8 [mu] m. A method of making the sintered ceramic body is also disclosed.

本文公开了一种烧结陶瓷体，其包含如使用XRD和图像处理方法测量的从90体积％至99.9体积％的多晶钇铝石榴石(YAG)，以及如由根据ASTM B962‑17执行的密度测量计算出的从0.1％至4％的体积孔隙率。所述烧结陶瓷体可具有99.99％和更大的总纯度以及从0.3μm至8μm的晶粒大小。还公开了一种制造所述烧结陶瓷体的方法。

Plasma resistant yttrium aluminum oxide bodies

VOLKEL LUDWIG / BISTA SIMONE / DORON MICHAEL J / KENNEDY SCOTT R

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods, and from 0.1% to 4% by volume porosity as calculated from density measurement performed according to ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 [mu] m to 8 [mu] m. A method of making the sintered ceramic body is also disclosed.

本文公开了一种烧结陶瓷体，其包含如使用XRD和图像处理方法测量的从90体积％至99.9体积％的多晶钇铝石榴石(YAG)，以及如由根据ASTM B962‑17执行的密度测量计算出的从0.1％至4％的体积孔隙率。所述烧结陶瓷体可具有99.99％和更大的总纯度以及从0.3μm至8μm的晶粒大小。还公开了一种制造所述烧结陶瓷体的方法。

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Titel:

Plasma resistant yttrium aluminum oxide bodies

Weitere Titelangaben:

耐等离子体的钇铝氧化物体

Beteiligte:

VOLKEL LUDWIG (Autor:in) / BISTA SIMONE (Autor:in) / DORON MICHAEL J (Autor:in) / KENNEDY SCOTT R (Autor:in)

Erscheinungsdatum:

12.07.2022

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Chinesisch

Klassifikation:

IPC: C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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