Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
PLASMABESTÄNDIGER YTTRIUM-ALUMINIUMOXID-KÖRPER
CORPS D'OXYDE D'YTTRIUM-ALUMINIUM RÉSISTANT AU PLASMA
WALKER LUKE (Autor:in) / BISTA SAURAV (Autor:in) / DONELON MATTHEW JOSEPH (Autor:in) / KENNEDY STEVEN ROGER (Autor:in)
28.09.2022
Patent
Elektronische Ressource
Englisch
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