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Plasma resistant yttrium aluminum oxide bodies
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods, and from 0.1% to 4% by volume porosity as calculated from density measurement performed according to ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 [mu] m to 8 [mu] m. A method of making the sintered ceramic body is also disclosed.
本文公开了一种烧结陶瓷体，其包含如使用XRD和图像处理方法测量的从90体积％至99.9体积％的多晶钇铝石榴石(YAG)，以及如由根据ASTM B962‑17执行的密度测量计算出的从0.1％至4％的体积孔隙率。所述烧结陶瓷体可具有99.99％和更大的总纯度以及从0.3μm至8μm的晶粒大小。还公开了一种制造所述烧结陶瓷体的方法。
Plasma resistant yttrium aluminum oxide bodies
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods, and from 0.1% to 4% by volume porosity as calculated from density measurement performed according to ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 [mu] m to 8 [mu] m. A method of making the sintered ceramic body is also disclosed.
本文公开了一种烧结陶瓷体，其包含如使用XRD和图像处理方法测量的从90体积％至99.9体积％的多晶钇铝石榴石(YAG)，以及如由根据ASTM B962‑17执行的密度测量计算出的从0.1％至4％的体积孔隙率。所述烧结陶瓷体可具有99.99％和更大的总纯度以及从0.3μm至8μm的晶粒大小。还公开了一种制造所述烧结陶瓷体的方法。
Plasma resistant yttrium aluminum oxide bodies
耐等离子体的钇铝氧化物体
VOLKEL LUDWIG (author) / BISTA SIMONE (author) / DORON MICHAEL J (author) / KENNEDY SCOTT R (author)
2022-07-12
Patent
Electronic Resource
Chinese
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