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Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
The invention discloses a manufacturing method of a YBCO (Yttrium Barium Copper Oxide) target material and a target material mold. The method comprises the following steps: preparing target material powder by adopting a solid-phase reaction method; the target material powder is placed in a target material mold and then subjected to hot sintering, and a target material is obtained; wherein the density of the target material is greater than 95%. According to the manufacturing method of the YBCO target material and the target material mold, the granularity of the raw materials is reduced through multiple times of grinding and pre-sintering, the target material prepared through a discharge plasma assisted hot pressing sintering or cold pressing method is smooth in surface, and the compactness reaches 95% or above.
公开了一种YBCO靶材的制造方法及靶材模具,方法包括:采用固相反应法制备靶材粉料;将靶材粉料放置在靶材模具中后进行热烧结,以获得靶材;其中,所述靶材的致密度大于95%。本申请提供的YBCO靶材的制造方法及靶材模具,通过多次研磨及预烧结降低原材料颗粒度,以及通过放电等离子辅助热压烧结或冷压法制备的靶材,表面光滑、致密度达95%以上。
Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
The invention discloses a manufacturing method of a YBCO (Yttrium Barium Copper Oxide) target material and a target material mold. The method comprises the following steps: preparing target material powder by adopting a solid-phase reaction method; the target material powder is placed in a target material mold and then subjected to hot sintering, and a target material is obtained; wherein the density of the target material is greater than 95%. According to the manufacturing method of the YBCO target material and the target material mold, the granularity of the raw materials is reduced through multiple times of grinding and pre-sintering, the target material prepared through a discharge plasma assisted hot pressing sintering or cold pressing method is smooth in surface, and the compactness reaches 95% or above.
公开了一种YBCO靶材的制造方法及靶材模具,方法包括:采用固相反应法制备靶材粉料;将靶材粉料放置在靶材模具中后进行热烧结,以获得靶材;其中,所述靶材的致密度大于95%。本申请提供的YBCO靶材的制造方法及靶材模具,通过多次研磨及预烧结降低原材料颗粒度,以及通过放电等离子辅助热压烧结或冷压法制备的靶材,表面光滑、致密度达95%以上。
Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
YBCO靶材的制造方法及靶材模具
FENG ZHONGPEI (Autor:in) / YANG JINGTING (Autor:in) / LIU WEI (Autor:in) / XU BO (Autor:in) / ZHENG XIN (Autor:in) / JIN KUI (Autor:in) / YUAN JIE (Autor:in) / ZHAO ZHONGXIAN (Autor:in)
28.04.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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