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Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
The invention discloses a manufacturing method of a YBCO (Yttrium Barium Copper Oxide) target material and a target material mold. The method comprises the following steps: preparing target material powder by adopting a solid-phase reaction method; the target material powder is placed in a target material mold and then subjected to hot sintering, and a target material is obtained; wherein the density of the target material is greater than 95%. According to the manufacturing method of the YBCO target material and the target material mold, the granularity of the raw materials is reduced through multiple times of grinding and pre-sintering, the target material prepared through a discharge plasma assisted hot pressing sintering or cold pressing method is smooth in surface, and the compactness reaches 95% or above.
公开了一种YBCO靶材的制造方法及靶材模具，方法包括：采用固相反应法制备靶材粉料；将靶材粉料放置在靶材模具中后进行热烧结，以获得靶材；其中，所述靶材的致密度大于95％。本申请提供的YBCO靶材的制造方法及靶材模具，通过多次研磨及预烧结降低原材料颗粒度，以及通过放电等离子辅助热压烧结或冷压法制备的靶材，表面光滑、致密度达95％以上。
Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
The invention discloses a manufacturing method of a YBCO (Yttrium Barium Copper Oxide) target material and a target material mold. The method comprises the following steps: preparing target material powder by adopting a solid-phase reaction method; the target material powder is placed in a target material mold and then subjected to hot sintering, and a target material is obtained; wherein the density of the target material is greater than 95%. According to the manufacturing method of the YBCO target material and the target material mold, the granularity of the raw materials is reduced through multiple times of grinding and pre-sintering, the target material prepared through a discharge plasma assisted hot pressing sintering or cold pressing method is smooth in surface, and the compactness reaches 95% or above.
公开了一种YBCO靶材的制造方法及靶材模具，方法包括：采用固相反应法制备靶材粉料；将靶材粉料放置在靶材模具中后进行热烧结，以获得靶材；其中，所述靶材的致密度大于95％。本申请提供的YBCO靶材的制造方法及靶材模具，通过多次研磨及预烧结降低原材料颗粒度，以及通过放电等离子辅助热压烧结或冷压法制备的靶材，表面光滑、致密度达95％以上。
Manufacturing method of YBCO (Yttrium Barium Copper Oxide) target material and target material mold
YBCO靶材的制造方法及靶材模具
FENG ZHONGPEI (author) / YANG JINGTING (author) / LIU WEI (author) / XU BO (author) / ZHENG XIN (author) / JIN KUI (author) / YUAN JIE (author) / ZHAO ZHONGXIAN (author)
2023-04-28
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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