Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Molybdenum tantalum oxide target material and preparation method and application thereof
The invention provides a molybdenum tantalum oxide target material and a preparation method and application thereof, and the preparation method comprises the following steps: (1) uniformly mixing molybdenum trioxide powder and tantalum powder to obtain a mixture; (2) uniformly mixing a binder solution and the mixture obtained in the step (1), and then carrying out cold pressing; and (3) after cold pressing is finished, pressureless sintering is carried out, and the molybdenum tantalum oxide target material is obtained. According to the preparation method provided by the invention, the binder is added into the mixture to enhance the strength among particles, and then the compactness of the obtained molybdenum tantalum oxide target material is improved in a mode of combining cold pressing and pressureless sintering, so that the problem of low compactness caused by sublimation of molybdenum oxide at a high temperature is avoided.
本发明提供了一种氧化钼钽靶材及其制备方法与应用，所述制备方法包括如下步骤：(1)均匀混合三氧化钼粉与钽粉，得到混合料；(2)均匀混合粘结剂溶液与步骤(1)所得混合料，然后进行冷压；(3)冷压结束后进行无压烧结，得到所述氧化钼钽靶材。本发明提供的制备方法在混合料中添加粘结剂以增强颗粒之间的强度，而后通过冷压以及无压烧结相结合的方式，提高了所得氧化钼钽靶材的致密度，避免了氧化钼在高温下升华导致的致密度偏低的问题。
Molybdenum tantalum oxide target material and preparation method and application thereof
The invention provides a molybdenum tantalum oxide target material and a preparation method and application thereof, and the preparation method comprises the following steps: (1) uniformly mixing molybdenum trioxide powder and tantalum powder to obtain a mixture; (2) uniformly mixing a binder solution and the mixture obtained in the step (1), and then carrying out cold pressing; and (3) after cold pressing is finished, pressureless sintering is carried out, and the molybdenum tantalum oxide target material is obtained. According to the preparation method provided by the invention, the binder is added into the mixture to enhance the strength among particles, and then the compactness of the obtained molybdenum tantalum oxide target material is improved in a mode of combining cold pressing and pressureless sintering, so that the problem of low compactness caused by sublimation of molybdenum oxide at a high temperature is avoided.
本发明提供了一种氧化钼钽靶材及其制备方法与应用，所述制备方法包括如下步骤：(1)均匀混合三氧化钼粉与钽粉，得到混合料；(2)均匀混合粘结剂溶液与步骤(1)所得混合料，然后进行冷压；(3)冷压结束后进行无压烧结，得到所述氧化钼钽靶材。本发明提供的制备方法在混合料中添加粘结剂以增强颗粒之间的强度，而后通过冷压以及无压烧结相结合的方式，提高了所得氧化钼钽靶材的致密度，避免了氧化钼在高温下升华导致的致密度偏低的问题。
Molybdenum tantalum oxide target material and preparation method and application thereof
一种氧化钼钽靶材及其制备方法与应用
YAO LIJUN (Autor:in) / PAN JIE (Autor:in) / HUANG JIEWEN (Autor:in) / WANG XUEZE (Autor:in) / WU DONGQING (Autor:in)
27.06.2023
Patent
Elektronische Ressource
Chinesisch
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