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Composite nickel magnesium oxide target material and preparation method thereof
The invention relates to the technical field of target production, and discloses a preparation method of a composite nickel magnesium oxide target, which mainly comprises the following steps: mixing NiO powder and MgO powder, ball-milling, and sieving to obtain mixed powder of NiO and MgO; in the ball milling process, the sizes of the grinding balls are phi 2, phi 5 and phi 10, the number ratio of the grinding balls of phi 2 to phi 5 to phi 10 is 3: 2: 1, and the mass ratio of the grinding balls to the materials is (2-4): 1; the prepared mixed powder of NiO and MgO is subjected to mold filling, pre-pressing, vacuum hot pressing and demolding treatment, and a nickel magnesium oxide blank is obtained; finally, the prepared nickel magnesium oxide blank is machined, the nickel magnesium oxide target material is obtained, through the design, the method is easy to operate, and the nickel magnesium oxide target material with the relative density exceeding 98% can be manufactured without conducting segmented sintering or segmented degreasing like a traditional preparation method.
本发明涉及靶材生产技术领域,公开了一种复合氧化镍镁靶材的制备方法,主要包括以下步骤,先将NiO粉和MgO粉进行混合、球磨、过筛,得到NiO、MgO的混合粉体;且在球磨过程中,所述磨球的大小为φ2、φ5和φ10,且□2、φ5、φ10的磨球的数量比为3:2:1,且磨球与物料的质量比为2~4:1;再将制得的NiO、MgO的混合粉体以此进行装模、预压、真空热压、脱模处理,得到氧化镍镁毛坯;最后对制得的氧化镍镁毛坯机械加工,得到氧化镍镁靶材,通过此设计使得该方法的操作简单,无需同传统制备方法一样进行分段烧结或分段脱脂,即可制造出相对密度超过98%的氧化镍镁靶材。
Composite nickel magnesium oxide target material and preparation method thereof
The invention relates to the technical field of target production, and discloses a preparation method of a composite nickel magnesium oxide target, which mainly comprises the following steps: mixing NiO powder and MgO powder, ball-milling, and sieving to obtain mixed powder of NiO and MgO; in the ball milling process, the sizes of the grinding balls are phi 2, phi 5 and phi 10, the number ratio of the grinding balls of phi 2 to phi 5 to phi 10 is 3: 2: 1, and the mass ratio of the grinding balls to the materials is (2-4): 1; the prepared mixed powder of NiO and MgO is subjected to mold filling, pre-pressing, vacuum hot pressing and demolding treatment, and a nickel magnesium oxide blank is obtained; finally, the prepared nickel magnesium oxide blank is machined, the nickel magnesium oxide target material is obtained, through the design, the method is easy to operate, and the nickel magnesium oxide target material with the relative density exceeding 98% can be manufactured without conducting segmented sintering or segmented degreasing like a traditional preparation method.
本发明涉及靶材生产技术领域,公开了一种复合氧化镍镁靶材的制备方法,主要包括以下步骤,先将NiO粉和MgO粉进行混合、球磨、过筛,得到NiO、MgO的混合粉体;且在球磨过程中,所述磨球的大小为φ2、φ5和φ10,且□2、φ5、φ10的磨球的数量比为3:2:1,且磨球与物料的质量比为2~4:1;再将制得的NiO、MgO的混合粉体以此进行装模、预压、真空热压、脱模处理,得到氧化镍镁毛坯;最后对制得的氧化镍镁毛坯机械加工,得到氧化镍镁靶材,通过此设计使得该方法的操作简单,无需同传统制备方法一样进行分段烧结或分段脱脂,即可制造出相对密度超过98%的氧化镍镁靶材。
Composite nickel magnesium oxide target material and preparation method thereof
一种复合氧化镍镁靶材及其制备方法
SHEN WENXING (Autor:in) / BAI PINGPING (Autor:in) / TONG PEIYUN (Autor:in)
19.09.2023
Patent
Elektronische Ressource
Chinesisch
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