Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of magnesium oxide target material
The invention provides a magnesium oxide target material preparation method, which comprises: carrying out ball milling on a magnesium oxide raw material, carrying out cold isostatic pressing molding and hot pressing sintering, and carrying out annealing treatment to obtain the magnesium oxide target material. The preparation method of the magnesium oxide target material combines isostatic cool pressing, hot pressing sintering and annealing processes, the process is simple and easy to operate, the density of the prepared magnesium oxide target material can reach 95% or above, especially can reach 98% or above, the purity is high, and cracks are few.
本发明提供了一种氧化镁靶材的制备方法，所述制备方法包括如下步骤：将氧化镁原料进行球磨后，进行冷等静压成型和热压烧结，再进行退火处理，得到氧化镁靶材。本发明提供的氧化镁靶材的制备方法结合冷等静压、热压烧结和退火工艺，工艺简单，易于操作，制备的氧化镁靶材致密度可达95％以上，尤其可以达到98％以上，纯度高、裂纹少。
Preparation method of magnesium oxide target material
The invention provides a magnesium oxide target material preparation method, which comprises: carrying out ball milling on a magnesium oxide raw material, carrying out cold isostatic pressing molding and hot pressing sintering, and carrying out annealing treatment to obtain the magnesium oxide target material. The preparation method of the magnesium oxide target material combines isostatic cool pressing, hot pressing sintering and annealing processes, the process is simple and easy to operate, the density of the prepared magnesium oxide target material can reach 95% or above, especially can reach 98% or above, the purity is high, and cracks are few.
本发明提供了一种氧化镁靶材的制备方法，所述制备方法包括如下步骤：将氧化镁原料进行球磨后，进行冷等静压成型和热压烧结，再进行退火处理，得到氧化镁靶材。本发明提供的氧化镁靶材的制备方法结合冷等静压、热压烧结和退火工艺，工艺简单，易于操作，制备的氧化镁靶材致密度可达95％以上，尤其可以达到98％以上，纯度高、裂纹少。
Preparation method of magnesium oxide target material
一种氧化镁靶材的制备方法
YAO LIJUN (Autor:in) / PAN JIE (Autor:in) / ZHOU YOUPING (Autor:in) / HUANG DONGCHANG (Autor:in) / YIN BO (Autor:in)
13.10.2023
Patent
Elektronische Ressource
Chinesisch
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