Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density nickel magnesium oxide target material and preparation method thereof
The invention belongs to the field of perovskite solar cell materials, and discloses a high-density nickel magnesium oxide target material and a preparation method thereof. The preparation method comprises the following steps: proportioning NiO powder and MgO powder according to the atomic percentage content of Mg of 0.1-10 at%, loading the prepared powder into a double-motion mixer for homogeneous mixing treatment, then carrying out cold pressing on the uniformly mixed powder to 5-10 MPa, vacuumizing to be less than 10 Pa, then heating to 300-400 DEG C for heat preservation pretreatment, then heating to 1000-1200 DEG C, pressurizing to 30-50 MPa for hot pressed sintering, and finally cooling to room temperature to obtain the NiO-MgO composite material. A target blank is obtained; and the obtained blank target is subjected to surface grinding through a diamond grinding wheel and outer circle cutting through water cutting in sequence, and the high-density nickel-magnesium-oxygen target material is obtained. The preparation method is easy to operate and low in cost, and the prepared target material is uniform in component, good in conductivity, free of internal defects and high in density and meets the requirement of a sputtering target.
本发明属于钙钛矿太阳能电池材料领域，公开了一种高密度镍镁氧靶材及其制备方法。所述制备方法包括如下步骤：将NiO粉和MgO粉按照Mg的原子百分含量为0.1～10at％进行配料，将配好的粉末装入双运动混合机中均质混合处理，然后将混合均匀的粉末冷压至5～10MPa后，抽真空至小于10Pa，然后升温至300～400℃保温预处理，再升温至1000～1200℃并加压至30～50MPa进行热压烧结，得到靶坯；将所得坯靶依次采用金刚石砂轮磨面和水切割切割外圆，得到高密度镍镁氧靶材。本发明制备方法操作简单、成本低，所制备的靶材组分均匀、导电性良好、内部无缺陷，密度高，符合溅射靶要求。
High-density nickel magnesium oxide target material and preparation method thereof
The invention belongs to the field of perovskite solar cell materials, and discloses a high-density nickel magnesium oxide target material and a preparation method thereof. The preparation method comprises the following steps: proportioning NiO powder and MgO powder according to the atomic percentage content of Mg of 0.1-10 at%, loading the prepared powder into a double-motion mixer for homogeneous mixing treatment, then carrying out cold pressing on the uniformly mixed powder to 5-10 MPa, vacuumizing to be less than 10 Pa, then heating to 300-400 DEG C for heat preservation pretreatment, then heating to 1000-1200 DEG C, pressurizing to 30-50 MPa for hot pressed sintering, and finally cooling to room temperature to obtain the NiO-MgO composite material. A target blank is obtained; and the obtained blank target is subjected to surface grinding through a diamond grinding wheel and outer circle cutting through water cutting in sequence, and the high-density nickel-magnesium-oxygen target material is obtained. The preparation method is easy to operate and low in cost, and the prepared target material is uniform in component, good in conductivity, free of internal defects and high in density and meets the requirement of a sputtering target.
本发明属于钙钛矿太阳能电池材料领域，公开了一种高密度镍镁氧靶材及其制备方法。所述制备方法包括如下步骤：将NiO粉和MgO粉按照Mg的原子百分含量为0.1～10at％进行配料，将配好的粉末装入双运动混合机中均质混合处理，然后将混合均匀的粉末冷压至5～10MPa后，抽真空至小于10Pa，然后升温至300～400℃保温预处理，再升温至1000～1200℃并加压至30～50MPa进行热压烧结，得到靶坯；将所得坯靶依次采用金刚石砂轮磨面和水切割切割外圆，得到高密度镍镁氧靶材。本发明制备方法操作简单、成本低，所制备的靶材组分均匀、导电性良好、内部无缺陷，密度高，符合溅射靶要求。
High-density nickel magnesium oxide target material and preparation method thereof
一种高密度镍镁氧靶材及其制备方法
XIE XIAOLIN (Autor:in) / ZHANG SHIXIANG (Autor:in) / PAN HONGYU (Autor:in) / WEN CHONGBIN (Autor:in)
29.03.2024
Patent
Elektronische Ressource
Chinesisch
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