Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Transparent magnesium oxide ceramic target material and preparation method thereof
The embodiment of the invention discloses a transparent magnesium oxide ceramic target material and a preparation method thereof. The preparation method comprises the following steps: S1, carrying out spray granulation on nano magnesium oxide powder; s2, powder obtained through spray granulation is formed into a target material biscuit under cold isostatic pressing; s3, sintering the target material biscuit under set conditions; and S4, carrying out gradient annealing treatment on the sintered target material biscuit to obtain the transparent magnesium oxide target material. According to the preparation method of the transparent magnesium oxide ceramic target material disclosed by the embodiment of the invention, the transparent magnesium oxide ceramic target material of which the relative density can reach 99.9% or above is prepared.
本发明实施例公开了透明氧化镁陶瓷靶材及其制备方法；制备方法包括步骤：S1、纳米氧化镁粉体进行喷雾造粒；S2、喷雾造粒得到的粉体在冷等静压下成型为靶材素坯；S3、靶材素坯在设定条件下烧结；S4、烧结后的靶材素坯进行梯度退火处理，得到透明氧化镁靶材。本发明实施例公开的透明氧化镁陶瓷靶材的制备方法，制备得到了相对密度在可达99.9％以上的透明氧化镁陶瓷靶材。
Transparent magnesium oxide ceramic target material and preparation method thereof
The embodiment of the invention discloses a transparent magnesium oxide ceramic target material and a preparation method thereof. The preparation method comprises the following steps: S1, carrying out spray granulation on nano magnesium oxide powder; s2, powder obtained through spray granulation is formed into a target material biscuit under cold isostatic pressing; s3, sintering the target material biscuit under set conditions; and S4, carrying out gradient annealing treatment on the sintered target material biscuit to obtain the transparent magnesium oxide target material. According to the preparation method of the transparent magnesium oxide ceramic target material disclosed by the embodiment of the invention, the transparent magnesium oxide ceramic target material of which the relative density can reach 99.9% or above is prepared.
本发明实施例公开了透明氧化镁陶瓷靶材及其制备方法；制备方法包括步骤：S1、纳米氧化镁粉体进行喷雾造粒；S2、喷雾造粒得到的粉体在冷等静压下成型为靶材素坯；S3、靶材素坯在设定条件下烧结；S4、烧结后的靶材素坯进行梯度退火处理，得到透明氧化镁靶材。本发明实施例公开的透明氧化镁陶瓷靶材的制备方法，制备得到了相对密度在可达99.9％以上的透明氧化镁陶瓷靶材。
Transparent magnesium oxide ceramic target material and preparation method thereof
透明氧化镁陶瓷靶材及其制备方法
LIU MIAO (Autor:in) / SUN BENSHUANG (Autor:in) / QIAN ZHIJIE (Autor:in) / HE JILIN (Autor:in) / WANG CHENGDUO (Autor:in) / LIU YANG (Autor:in) / CHEN JIE (Autor:in) / ZENG XUEYUN (Autor:in) / WANG ZHIJUN (Autor:in)
29.03.2024
Patent
Elektronische Ressource
Chinesisch
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