Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention discloses a silicon oxynitride-quartz composite material crucible and a preparation method thereof, a composite material of silicon oxynitride and quartz is used as a crucible wall of the crucible, quartz sand and high-purity silicon nitride powder are mixed to form a mixture, the mixture is used as a raw material to manufacture the crucible by adopting a rotary die method-electric arc melting method, and the crucible is prepared by adopting a high-temperature sintering method. In the heating and heat preservation process, silicon nitride in the mixture powder reacts with part of quartz sand at high temperature to form silicon oxynitride, the electric arc heating and heat preservation time is prolonged by 20-80% compared with a pure quartz crucible of the same specification, and the crucible wall of the crucible is made of a composite material of uniform silicon oxynitride and quartz. The content of silicon oxynitride in the gradient composite material is gradually increased from outside to inside of the crucible wall, or the outer layer is quartz and the inner layer is the composite material. The obtained composite material crucible is high in strength, good in silicon melt wettability resistance, strong in bubble migration resistance and long in service life, and the Czochralski silicon produced by the composite material crucible is low in oxygen content and can replace a pure quartz crucible to be used for large-scale production of the Czochralski silicon.
本发明公开了一种氮氧化硅‑石英复合材料坩埚及其制备方法，以氮氧化硅与石英的复合材料作为坩埚的埚壁，先由石英砂与高纯氮化硅粉混合形成混合料，以混合料为原料采用旋转模具法‑电弧熔制法制作坩埚，加热保温过程中混合料粉体中的氮化硅与部分石英砂在高温下反应形成氮氧化硅，电弧加热保温时间比同等规格纯石英坩埚延长20～80％，坩埚的埚壁的组成为均匀氮氧化硅与石英的复合材料，或氮氧化硅含量从坩埚壁外向里逐渐增加的梯度复合材料，或者外层石英内层上述复合材料。所得复合材料坩埚强度高、抗硅熔体润湿性好、抗气泡迁移能力强、寿命长，以其生产的直拉单晶硅氧含量低，可替代纯石英坩埚用于规模化直拉单晶硅生产。
The invention discloses a silicon oxynitride-quartz composite material crucible and a preparation method thereof, a composite material of silicon oxynitride and quartz is used as a crucible wall of the crucible, quartz sand and high-purity silicon nitride powder are mixed to form a mixture, the mixture is used as a raw material to manufacture the crucible by adopting a rotary die method-electric arc melting method, and the crucible is prepared by adopting a high-temperature sintering method. In the heating and heat preservation process, silicon nitride in the mixture powder reacts with part of quartz sand at high temperature to form silicon oxynitride, the electric arc heating and heat preservation time is prolonged by 20-80% compared with a pure quartz crucible of the same specification, and the crucible wall of the crucible is made of a composite material of uniform silicon oxynitride and quartz. The content of silicon oxynitride in the gradient composite material is gradually increased from outside to inside of the crucible wall, or the outer layer is quartz and the inner layer is the composite material. The obtained composite material crucible is high in strength, good in silicon melt wettability resistance, strong in bubble migration resistance and long in service life, and the Czochralski silicon produced by the composite material crucible is low in oxygen content and can replace a pure quartz crucible to be used for large-scale production of the Czochralski silicon.
本发明公开了一种氮氧化硅‑石英复合材料坩埚及其制备方法，以氮氧化硅与石英的复合材料作为坩埚的埚壁，先由石英砂与高纯氮化硅粉混合形成混合料，以混合料为原料采用旋转模具法‑电弧熔制法制作坩埚，加热保温过程中混合料粉体中的氮化硅与部分石英砂在高温下反应形成氮氧化硅，电弧加热保温时间比同等规格纯石英坩埚延长20～80％，坩埚的埚壁的组成为均匀氮氧化硅与石英的复合材料，或氮氧化硅含量从坩埚壁外向里逐渐增加的梯度复合材料，或者外层石英内层上述复合材料。所得复合材料坩埚强度高、抗硅熔体润湿性好、抗气泡迁移能力强、寿命长，以其生产的直拉单晶硅氧含量低，可替代纯石英坩埚用于规模化直拉单晶硅生产。
Silicon oxynitride-quartz composite material crucible and preparation method thereof
一种氮氧化硅-石英复合材料坩埚及其制备方法
ZHOU LANG (Autor:in)
27.10.2023
Patent
Elektronische Ressource
Chinesisch
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