Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density large-size ITO target material and preparation method thereof
The invention belongs to the technical field of ITO target material preparation, and discloses a high-density large-size ITO target material and a preparation method thereof.The preparation method of the high-density large-size ITO target material comprises the following steps that 1, an ITO biscuit is put into a degreasing and sintering integrated furnace to be heated to 280-300 DEG C at the heating rate of 100-150 DEG C/h, heat preservation is conducted for 10-25 h, and then the ITO biscuit is cooled to the room temperature; in the process, dry compressed air with the pressure of 0.1 MPa is continuously introduced at the flow rate of 20-30 L/min; 2, after heat preservation in the step 1 is completed, the temperature is increased to 600 DEG C to 620 DEG C at the temperature increasing speed of 80 DEG C/h to 110 DEG C/h, heat preservation is conducted for 8 h to 15 h, and dry compressed air is continuously introduced at the flow rate of 20 L/min to 30 L/min in the process; and 3, after heat preservation in the step 2 is completed, the temperature is reduced to 400 DEG C at the cooling rate of 60-100 DEG C/h, dry compressed air is introduced so that the pressure in the furnace can reach 0.15-2 MPa, and then pressure maintaining and heat preservation are conducted for 15-20 h. According to the method, a low-temperature and high-pressure heat and pressure preservation procedure is arranged between the degreasing procedure and the sintering procedure, so that moisture and a binder in the ITO biscuit are completely discharged from the interior of the target material, the density of the target material is improved, and meanwhile, cracking of the target material is avoided.
本发明属于ITO靶材制备技术领域，公开了一种高密度大尺寸ITO靶材及其制备方法，该高密度大尺寸ITO靶材的制备方法，包括如下步骤：步骤1：将ITO素坯放入脱脂烧结一体炉内以100‑150℃/h的升温速率升温至280‑300℃，保温10‑25h，过程中以20‑30L/min的流量持续通入0.1MPa的干燥压缩空气；步骤2：待步骤1保温完成后，以80‑110℃/h的升温速率升温至600‑620℃，保温8‑15h，过程中以20‑30L/min的流量持续通入干燥压缩空气；步骤3：待步骤2保温完成后，以60‑100℃/h的降温速率降温至400℃，并通入干燥压缩空气以使炉内压力达到0.15‑2MPa，然后保压保温15‑20h。本发明在脱脂与烧结工序之间设置了一道低温高压的保温保压工序，从而确保ITO素坯内的水分和粘结剂完全从靶材内部排出，提高靶材密度的同时还避免了靶材开裂。
High-density large-size ITO target material and preparation method thereof
The invention belongs to the technical field of ITO target material preparation, and discloses a high-density large-size ITO target material and a preparation method thereof.The preparation method of the high-density large-size ITO target material comprises the following steps that 1, an ITO biscuit is put into a degreasing and sintering integrated furnace to be heated to 280-300 DEG C at the heating rate of 100-150 DEG C/h, heat preservation is conducted for 10-25 h, and then the ITO biscuit is cooled to the room temperature; in the process, dry compressed air with the pressure of 0.1 MPa is continuously introduced at the flow rate of 20-30 L/min; 2, after heat preservation in the step 1 is completed, the temperature is increased to 600 DEG C to 620 DEG C at the temperature increasing speed of 80 DEG C/h to 110 DEG C/h, heat preservation is conducted for 8 h to 15 h, and dry compressed air is continuously introduced at the flow rate of 20 L/min to 30 L/min in the process; and 3, after heat preservation in the step 2 is completed, the temperature is reduced to 400 DEG C at the cooling rate of 60-100 DEG C/h, dry compressed air is introduced so that the pressure in the furnace can reach 0.15-2 MPa, and then pressure maintaining and heat preservation are conducted for 15-20 h. According to the method, a low-temperature and high-pressure heat and pressure preservation procedure is arranged between the degreasing procedure and the sintering procedure, so that moisture and a binder in the ITO biscuit are completely discharged from the interior of the target material, the density of the target material is improved, and meanwhile, cracking of the target material is avoided.
本发明属于ITO靶材制备技术领域，公开了一种高密度大尺寸ITO靶材及其制备方法，该高密度大尺寸ITO靶材的制备方法，包括如下步骤：步骤1：将ITO素坯放入脱脂烧结一体炉内以100‑150℃/h的升温速率升温至280‑300℃，保温10‑25h，过程中以20‑30L/min的流量持续通入0.1MPa的干燥压缩空气；步骤2：待步骤1保温完成后，以80‑110℃/h的升温速率升温至600‑620℃，保温8‑15h，过程中以20‑30L/min的流量持续通入干燥压缩空气；步骤3：待步骤2保温完成后，以60‑100℃/h的降温速率降温至400℃，并通入干燥压缩空气以使炉内压力达到0.15‑2MPa，然后保压保温15‑20h。本发明在脱脂与烧结工序之间设置了一道低温高压的保温保压工序，从而确保ITO素坯内的水分和粘结剂完全从靶材内部排出，提高靶材密度的同时还避免了靶材开裂。
High-density large-size ITO target material and preparation method thereof
一种高密度大尺寸ITO靶材及其制备方法
LI LIWEI (Autor:in) / MA SHENG (Autor:in) / YU FANG (Autor:in) / LI MINGHONG (Autor:in)
22.03.2024
Patent
Elektronische Ressource
Chinesisch
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