Preparation method of porous ceramic for electrostatic chuck: Fid-Bau Portal

Preparation method of porous ceramic for electrostatic chuck

CHEN ZHENNING / SHI ZHEYUAN / LI JUN / XIAO WEI

The invention discloses a preparation method of porous ceramic for an electrostatic chuck, and belongs to the technical field of ceramic preparation, the preparation method comprises the following steps: gathering cellosilk together to form a bundle of cellosilk; uniformly coating oxide on a bundle of fibers; a plurality of fiber bundles with the surfaces coated with the oxide are put into a mold, the mold is sealed, then the mold is put into an isostatic press to be pressed, and the multiple fiber bundles are pressed together to obtain pressed fiber bundles; putting the pressed fiber bundle into the slurry, taking out, drying, putting into a circular mold, and pressing by using a static press again to obtain a cylindrical ceramic green body containing fiber; the ceramic green body is sintered, the cellosilk in the ceramic green body can be continuously increased and decomposed along with the sintering temperature, the space occupied by the cellosilk after the cellosilk is decomposed forms holes, and meanwhile the ceramic green body is sintered into a ceramic plate; and the ceramic plate is cut into corresponding shapes according to use requirements.

本发明公开了一种静电卡盘用多孔陶瓷的制备方法，属于陶瓷制备技术领域，所述制备方法包括以下步骤：将纤维丝聚集在一起，形成一捆纤维丝；往一捆纤维丝上均匀涂覆氧化物；将多捆表面涂覆有氧化物的纤维丝捆放入到模具中，密封模具，然后放到等静压机中压制，多捆纤维丝压制在一起后得到压制的纤维丝捆；将上述压制的纤维丝捆放入到浆料中，取出后烘干，然后放入到圆形模具中再一次使用静压机压制，得到圆柱形内含纤维丝的陶瓷生坯；对上述陶瓷生坯进行烧结，其中的纤维丝会随着烧结的温度不断升高和分解，纤维丝分解后其所占的空间即形成看孔洞，同时，陶瓷生坯烧结成陶瓷板；根据使用的需要将上述陶瓷板切割成相应的形状。

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