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    CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME

    본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.

    According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.

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    CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME

    본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.

    According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.

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    CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME

    본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.

    According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.

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    Titel:

    CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME

    Weitere Titelangaben:

    정전 척용 세라믹 조성물, 이를 이용한 정전 척

    Erscheinungsdatum:

    02.05.2022

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Koreanisch

    Klassifikation:

    IPC:  C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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