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Preparation method of low-oxygen-content pure beta-phase silicon nitride powder
The invention discloses a method for preparing low-oxygen-content pure beta-phase silicon nitride powder by taking high-oxygen-content silicon powder as a raw material, which comprises the following steps: uniformly mixing the high-oxygen-content silicon powder, a diluent and a catalyst, and carrying out combustion reaction in a nitrogen atmosphere to obtain the silicon nitride powder. The oxygen content of the adopted high-oxygen-content silicon powder is 1-12%, the prepared powder is pure beta-phase silicon nitride, and the oxygen content is lower than 1%. The low-oxygen-content pure beta-phase silicon nitride powder is prepared by taking the low-cost and high-oxygen-content silicon powder generated by cutting and crushing photovoltaic silicon as a raw material through a low-energy-consumption and short-period combustion synthesis process, can be used as a high-thermal-conductivity filler in the field of electronic packaging, and has important economic value.
本发明公开一种以高氧含量硅粉为原料制备低氧含量纯β相氮化硅粉体的方法,包括如下步骤:将高氧含量硅粉、稀释剂和催化剂混匀,在氮气气氛下进行燃烧反应得到氮化硅粉体。本发明采用的高氧含量硅粉的氧含量为1‑12%,制备的粉体为纯β相氮化硅,氧含量低于1%。本发明以光伏硅切割及破碎产生的低成本、高氧含量的硅粉为原料,通过低能耗、短周期的燃烧合成工艺,制备低氧含量纯β相氮化硅粉体,可在电子封装领域用作高导热填料,具有重要的经济价值。
Preparation method of low-oxygen-content pure beta-phase silicon nitride powder
The invention discloses a method for preparing low-oxygen-content pure beta-phase silicon nitride powder by taking high-oxygen-content silicon powder as a raw material, which comprises the following steps: uniformly mixing the high-oxygen-content silicon powder, a diluent and a catalyst, and carrying out combustion reaction in a nitrogen atmosphere to obtain the silicon nitride powder. The oxygen content of the adopted high-oxygen-content silicon powder is 1-12%, the prepared powder is pure beta-phase silicon nitride, and the oxygen content is lower than 1%. The low-oxygen-content pure beta-phase silicon nitride powder is prepared by taking the low-cost and high-oxygen-content silicon powder generated by cutting and crushing photovoltaic silicon as a raw material through a low-energy-consumption and short-period combustion synthesis process, can be used as a high-thermal-conductivity filler in the field of electronic packaging, and has important economic value.
本发明公开一种以高氧含量硅粉为原料制备低氧含量纯β相氮化硅粉体的方法,包括如下步骤:将高氧含量硅粉、稀释剂和催化剂混匀,在氮气气氛下进行燃烧反应得到氮化硅粉体。本发明采用的高氧含量硅粉的氧含量为1‑12%,制备的粉体为纯β相氮化硅,氧含量低于1%。本发明以光伏硅切割及破碎产生的低成本、高氧含量的硅粉为原料,通过低能耗、短周期的燃烧合成工艺,制备低氧含量纯β相氮化硅粉体,可在电子封装领域用作高导热填料,具有重要的经济价值。
Preparation method of low-oxygen-content pure beta-phase silicon nitride powder
一种低氧含量纯β相氮化硅粉体的制备方法
HE GANG (Autor:in) / LI CHONGJUN (Autor:in) / YANG LEI (Autor:in) / HU ZHANGGUI (Autor:in)
14.06.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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